Taako Hirosaki

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Positive resist composition and resist pattern forming method
- Patent number 7,687,221
- Issue date Mar 30, 2010
- Tokyo Ohka Kogyo Co., Ltd.
- Taako Hirosaki
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...