Tac Huynh

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Hayward, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for conditioning a polishing pad used in chemi...
- Patent number 6,328,637
- Issue date Dec 11, 2001
- Lam Research Corporation
- Michael Labunsky
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for conditioning a polishing pad used in chemi...
- Patent number 6,086,460
- Issue date Jul 11, 2000
- Lam Research Corporation
- Michael Labunsky
- B24 - GRINDING POLISHING