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Tadahiro Takigawa
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Kawasaki, JP
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last 30 patents
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Patent Grant
Pattern transfer apparatus, an operation management system thereof,...
Patent number
5,909,030
Issue date
Jun 1, 1999
Kabushiki Kaisha Toshiba
Shusuke Yoshitake
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Focused ion beam deposition using TMCTS
Patent number
5,639,699
Issue date
Jun 17, 1997
Kabushiki Kaisha Toshiba
Hiroko Nakamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of repairing defect of structure
Patent number
5,429,730
Issue date
Jul 4, 1995
Kabushiki Kaisha Toshiba
Hiroko Nakamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing an insulating film and a focusing ion beam app...
Patent number
5,083,033
Issue date
Jan 21, 1992
Kabushiki Kaisha Toshiba
Haruki Komano
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming a fine pattern with a charged particle beam
Patent number
4,712,013
Issue date
Dec 8, 1987
Kabushiki Kaisha Toshiba
Eiji Nishimura
B82 - NANO-TECHNOLOGY