TREA

Tadahiro Takigawa

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  • Inagi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Exposure method utilizing an energy beam
    • Patent number 4,530,064
    • Issue date Jul 16, 1985
    • Tokyo Shibaura Denki Kabushiki Kaisha
    • Tadahiro Takigawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ion implantation method
    • Patent number 4,481,042
    • Issue date Nov 6, 1984
    • Tokyo Shibaura Denki Kabushiki Kaisha
    • Tadahiro Takigawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Processing method using a focused ion beam
    • Patent number 4,457,803
    • Issue date Jul 3, 1984
    • Tokyo Shibaura Denki Kabushiki Kaisha
    • Tadahiro Takigawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electron beam exposing apparatus
    • Patent number 4,430,570
    • Issue date Feb 7, 1984
    • Tokyo Shibaura Denki Kabushiki Kaisha
    • Tadahiro Takigawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electron beam apparatus
    • Patent number 4,424,448
    • Issue date Jan 3, 1984
    • Tokyo Shibaura Denki Kabushiki Kaisha
    • Tadahiro Takigawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electron gun
    • Patent number 4,363,995
    • Issue date Dec 14, 1982
    • Tokyo Shibaura Denki Kabushiki Kaisha
    • Tadahiro Takigawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electron beam system
    • Patent number 4,321,510
    • Issue date Mar 23, 1982
    • Tokyo Shibaura Denki Kabushiki Kaisha
    • Tadahiro Takigawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electron beam exposing method and electron beam apparatus
    • Patent number 4,199,689
    • Issue date Apr 22, 1980
    • Tokyo Shibaura Denki Kabushiki Kaisha
    • Tadahiro Takigawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electron beam exposure apparatus
    • Patent number 4,151,417
    • Issue date Apr 24, 1979
    • Vlsi Technology Research Association
    • Tadahiro Takigawa
    • H01 - BASIC ELECTRIC ELEMENTS