Tadahito Matsuda

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Hohya, JP

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Patents Grantslast 30 patents

Information Patent Grant
Mark position detection system for use in charged particle beam app...
- Patent number 4,808,829
- Issue date Feb 28, 1989
- Hitachi Ltd.
- Masahide Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure method with electron beam exposure apparatus
- Patent number 4,489,241
- Issue date Dec 18, 1984
- Hitachi, Ltd.
- Tadahito Matsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam control system
- Patent number 4,437,008
- Issue date Mar 13, 1984
- Nippon Telegraph & Telephone Public Corporation
- Tadahito Matsuda
- H01 - BASIC ELECTRIC ELEMENTS