Tadahito Matsuda

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Isehara, JP

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Patents Grantslast 30 patents

Information Patent Grant
Onium salts and positive resist materials using the same
- Patent number 6,841,334
- Issue date Jan 11, 2005
- Shin-Etsu Chemical Co., Ltd.
- Fujio Yagihashi
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Tertiary butyl 4,4-bis(4′-hydroxyphenyl) pentanoate derivat...
- Patent number 6,667,415
- Issue date Dec 23, 2003
- Shin-Etsu Chemical Co., Ltd.
- Fujio Yagihashi
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Projection exposure method and apparatus
- Patent number 5,636,004
- Issue date Jun 3, 1997
- Nippon Telegraph and Telephone Corporation
- Akihiro Ootaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Chemically amplified positive resist composition
- Patent number 5,624,787
- Issue date Apr 29, 1997
- Shin-Etsu Chemical Co., Ltd.
- Satoshi Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray exposure mask and fabrication method thereof
- Patent number 5,414,746
- Issue date May 9, 1995
- Nippon Telegraph & Telephone
- Kimiyoshi Deguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming resist micropattern
- Patent number 4,634,645
- Issue date Jan 6, 1987
- Nippon Telegraph & Telephone Corporation
- Tadahito Matsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Onium salts and positive resist materials using the same
- Publication number 20040076905
- Publication date Apr 22, 2004
- Fujio Yagihashi
- C07 - ORGANIC CHEMISTRY