Tadakazu Murai

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Forming method of amorphous carbon film, amorphous carbon film, mul...
- Patent number 8,409,460
- Issue date Apr 2, 2013
- Tokyo Electron Limited
- Hiraku Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FORMING METHOD OF AMORPHOUS CARBON FILM, AMORPHOUS CARBON FILM, MUL...
- Publication number 20100105213
- Publication date Apr 29, 2010
- TOKYO ELECTRON LIMITED
- Hiraku Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...