Tadaki MIYAZAKI

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Detection apparatus detection method and lithography apparatus
- Patent number 11,156,929
- Issue date Oct 26, 2021
- Canon Kabushiki Kaisha
- Tadaki Miyazaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Alignment apparatus, lithography apparatus, and article manufacturi...
- Patent number 10,659,736
- Issue date May 19, 2020
- Canon Kabushiki Kaisha
- Tadaki Miyazaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Position detection method, position detection apparatus, lithograph...
- Patent number 10,503,079
- Issue date Dec 10, 2019
- Canon Kabushiki Kaisha
- Tadaki Miyazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for detecting position, exposure apparatus, an...
- Patent number 10,314,142
- Issue date Jun 4, 2019
- Canon Kabushiki Kaisha
- Tadaki Miyazaki
- G01 - MEASURING TESTING
Information Patent Grant
Detection apparatus, detection method, and lithography apparatus
- Patent number 10,185,876
- Issue date Jan 22, 2019
- Canon Kabushiki Kaisha
- Tadaki Miyazaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Lithography apparatus, lithography method, and article manufacturin...
- Patent number 9,703,214
- Issue date Jul 11, 2017
- Canon Kabushiki Kaisha
- Tadaki Miyazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measuring apparatus, measuring method, lithography apparatus, and m...
- Patent number 9,606,461
- Issue date Mar 28, 2017
- Canon Kabushiki Kaisha
- Tadaki Miyazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection apparatus, exposure apparatus, and device fabric...
- Patent number 8,405,818
- Issue date Mar 26, 2013
- Canon Kabushiki Kaisha
- Tadaki Miyazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ALIGNMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURI...
- Publication number 20190199972
- Publication date Jun 27, 2019
- Canon Kabushiki Kaisha
- Tadaki Miyazaki
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
DETECTION APPARATUS DETECTION METHOD AND LITHOGRAPHY APPARATUS
- Publication number 20190121250
- Publication date Apr 25, 2019
- Canon Kabushiki Kaisha
- Tadaki MIYAZAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION DETECTION METHOD, POSITION DETECTION APPARATUS, LITHOGRAPH...
- Publication number 20180059553
- Publication date Mar 1, 2018
- Canon Kabushiki Kaisha
- Tadaki MIYAZAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR DETECTING POSITION, EXPOSURE APPARATUS, AN...
- Publication number 20170060003
- Publication date Mar 2, 2017
- Canon Kabushiki Kaisha
- Tadaki Miyazaki
- G01 - MEASURING TESTING
Information Patent Application
DETECTION APPARATUS, DETECTION METHOD, AND LITHOGRAPHY APPARATUS
- Publication number 20150206298
- Publication date Jul 23, 2015
- Canon Kabushiki Kaisha
- Tadaki Miyazaki
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
MEASURING APPARATUS, MEASURING METHOD, LITHOGRAPHY APPARATUS, AND M...
- Publication number 20150070679
- Publication date Mar 12, 2015
- Canon Kabushiki Kaisha
- Tadaki MIYAZAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND ARTICLE MANUFACTURIN...
- Publication number 20150022797
- Publication date Jan 22, 2015
- Canon Kabushiki Kaisha
- Tadaki MIYAZAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRIC...
- Publication number 20110051111
- Publication date Mar 3, 2011
- Canon Kabushiki Kaisha
- Tadaki MIYAZAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tadaki MIYAZAKI

Person

Patents Grantslast 30 patents

Detection apparatus detection method and lithography apparatus

Alignment apparatus, lithography apparatus, and article manufacturi...

Position detection method, position detection apparatus, lithograph...

Apparatus and method for detecting position, exposure apparatus, an...

Detection apparatus, detection method, and lithography apparatus

Lithography apparatus, lithography method, and article manufacturin...

Measuring apparatus, measuring method, lithography apparatus, and m...

Position detection apparatus, exposure apparatus, and device fabric...

Patents Applicationslast 30 patents

ALIGNMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURI...

DETECTION APPARATUS DETECTION METHOD AND LITHOGRAPHY APPARATUS

POSITION DETECTION METHOD, POSITION DETECTION APPARATUS, LITHOGRAPH...

APPARATUS AND METHOD FOR DETECTING POSITION, EXPOSURE APPARATUS, AN...

DETECTION APPARATUS, DETECTION METHOD, AND LITHOGRAPHY APPARATUS

MEASURING APPARATUS, MEASURING METHOD, LITHOGRAPHY APPARATUS, AND M...

LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND ARTICLE MANUFACTURIN...

POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRIC...