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Surface cleaning with argon
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Patent number 5,512,106
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Issue date Apr 30, 1996
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Sumitomo Heavy Industries, Ltd.
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Tadamoto Tamai
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B08 - CLEANING
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Ion implanting apparatus
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Patent number 4,914,292
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Issue date Apr 3, 1990
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Sumitomo Eaton Nova Corporation
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Tadamoto Tamai
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H01 - BASIC ELECTRIC ELEMENTS
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Ion implanting system
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Patent number 4,904,902
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Issue date Feb 27, 1990
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Sumitomo Eaton Nova Corporation
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Tadamoto Tamai
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H01 - BASIC ELECTRIC ELEMENTS