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Hino, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for inspecting integrated circuit pattern
Patent number
7,952,074
Issue date
May 31, 2011
Hitachi, Ltd.
Hiroyuki Shinada
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for inspecting integrated circuit pattern
Patent number
7,417,444
Issue date
Aug 26, 2008
Hitachi, Ltd.
Hiroyuki Shinada
G01 - MEASURING TESTING
Information
Patent Grant
Information recording method and information recording apparatus
Patent number
7,263,053
Issue date
Aug 28, 2007
Hitachi, Ltd.
Motoyasu Terao
G11 - INFORMATION STORAGE
Information
Patent Grant
Method and apparatus for inspecting integrated circuit pattern
Patent number
7,026,830
Issue date
Apr 11, 2006
Hitachi, Ltd.
Hiroyuki Shinada
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for inspecting integrated circuit pattern
Patent number
6,559,663
Issue date
May 6, 2003
Hitachi, Ltd.
Hiroyuki Shinada
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for inspecting integrated circuit pattern
Patent number
6,329,826
Issue date
Dec 11, 2001
Hitachi, Ltd.
Hiroyuki Shinada
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for inspecting integrated circuit pattern
Patent number
6,172,363
Issue date
Jan 9, 2001
Hitachi, Ltd.
Hiroyuki Shinada
G01 - MEASURING TESTING
Information
Patent Grant
Solid state laser apparatus
Patent number
6,104,734
Issue date
Aug 15, 2000
Hitachi, Ltd.
Tadao Ino
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR INSPECTING INTEGRATED CIRCUIT PATTERN
Publication number
20080302964
Publication date
Dec 11, 2008
Hiroyuki Shinada
G01 - MEASURING TESTING
Information
Patent Application
Method and apparatus for inspecting integrated circuit pattern
Publication number
20060043982
Publication date
Mar 2, 2006
Hitachi, Ltd.
Hiroyuki Shinada
G01 - MEASURING TESTING
Information
Patent Application
Information recording method and information recording apparatus
Publication number
20050007936
Publication date
Jan 13, 2005
Motoyasu Terao
G11 - INFORMATION STORAGE
Information
Patent Application
Method and apparatus for inspecting integrated circuit pattern
Publication number
20030169060
Publication date
Sep 11, 2003
Hitachi, Ltd.
Hiroyuki Shinada
G01 - MEASURING TESTING
Information
Patent Application
Method and apparatus for inspecting integrated circuit pattern
Publication number
20020027440
Publication date
Mar 7, 2002
Hitachi, Ltd.
Hiroyuki Shinada
G01 - MEASURING TESTING