Tadao Nakamura

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 11,880,132
- Issue date Jan 23, 2024
- Canon Kabushiki Kaisha
- Tadao Nakamura
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Measurement apparatus, lithography apparatus, and method of manufac...
- Patent number 11,537,056
- Issue date Dec 27, 2022
- Canon Kabushiki Kaisha
- Takamitsu Komaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 11,422,461
- Issue date Aug 23, 2022
- Canon Kabushiki Kaisha
- Tadao Nakamura
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Exposure method, exposure apparatus, and method of manufacturing ar...
- Patent number 10,394,134
- Issue date Aug 27, 2019
- Canon Kabushiki Kaisha
- Ryo Koizumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Foreign substance detection method, foreign substance detection app...
- Patent number 9,599,903
- Issue date Mar 21, 2017
- Canon Kabushiki Kaisha
- Tadao Nakamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method of manufacturing device
- Patent number 8,625,069
- Issue date Jan 7, 2014
- Canon Kabushiki Kaisha
- Nobuhiko Yabu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20220342299
- Publication date Oct 27, 2022
- Canon Kabushiki Kaisha
- Tadao Nakamura
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFAC...
- Publication number 20200409277
- Publication date Dec 31, 2020
- Canon Kabushiki Kaisha
- Takamitsu Komaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20200331190
- Publication date Oct 22, 2020
- Canon Kabushiki Kaisha
- Tadao Nakamura
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING AR...
- Publication number 20190041759
- Publication date Feb 7, 2019
- Canon Kabushiki Kaisha
- Ryo Koizumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FOREIGN SUBSTANCE DETECTION METHOD, FOREIGN SUBSTANCE DETECTION APP...
- Publication number 20150131065
- Publication date May 14, 2015
- Canon Kabushiki Kaisha
- Tadao NAKAMURA
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20080316447
- Publication date Dec 25, 2008
- Canon Kabushiki Kaisha
- Nobuhiko Yabu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tadao Nakamura

Person

Patents Grantslast 30 patents

Imprint apparatus and method of manufacturing article

Measurement apparatus, lithography apparatus, and method of manufac...

Imprint apparatus and method of manufacturing article

Exposure method, exposure apparatus, and method of manufacturing ar...

Foreign substance detection method, foreign substance detection app...

Exposure apparatus and method of manufacturing device

Patents Applicationslast 30 patents

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFAC...

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING AR...

FOREIGN SUBSTANCE DETECTION METHOD, FOREIGN SUBSTANCE DETECTION APP...

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE