Tadao Nakatsuka

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Osaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for detecting etching endpoint, and etching apparatus and et...
- Patent number 6,669,810
- Issue date Dec 30, 2003
- Sumitomo Metal Industries, Ltd.
- Toshiya Miyazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Etching apparatus and etching system using the method thereof
- Patent number 6,149,761
- Issue date Nov 21, 2000
- Sumitomo Metal Industries Limited
- Toshiya Miyazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Method for detecting etching endpoint, and etching apparatus and et...
- Patent number 5,885,472
- Issue date Mar 23, 1999
- Sumitomo Metal Industries Limited
- Toshiya Miyazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Method for detecting etching endpoint and etching apparatus and etc...
- Patent number 5,626,714
- Issue date May 6, 1997
- Sumitomo Metal Industries Limited
- Toshiya Miyazaki
- B24 - GRINDING POLISHING