Tadashi Aoto

Person

Kurokawa-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma etching apparatus
- Patent number 10,153,138
- Issue date Dec 11, 2018
- Tokyo Electron Limited
- Tadashi Aoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mounting table and plasma processing apparatus
- Patent number 9,589,823
- Issue date Mar 7, 2017
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck device
- Patent number 9,412,635
- Issue date Aug 9, 2016
- Tokyo Electron Limited
- Yasuharu Sasaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate mounting stage and surface treatment method therefor
- Patent number 9,214,376
- Issue date Dec 15, 2015
- Tokyo Electron Limited
- Masakazu Higuma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface processing method for mounting stage
- Patent number 8,343,372
- Issue date Jan 1, 2013
- Tokyo Electron Limited
- Tadashi Aoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface treatment method
- Patent number 7,815,492
- Issue date Oct 19, 2010
- Tokyo Electron Limited
- Yasuharu Sasaki
- B24 - GRINDING POLISHING
Information Patent Grant
Processing device and method of maintaining the device, mechanism a...
- Patent number 7,481,903
- Issue date Jan 27, 2009
- Tokyo Electron Limited
- Shigeru Senzaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing device and method of maintaining the device, mechanism a...
- Patent number 6,899,786
- Issue date May 31, 2005
- Tokyo Electron Limited
- Shigeru Senzaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUSCEPTOR, SUBSTRATE PROCESSING APPARATUS AND PROTECTION METHOD
- Publication number 20200243372
- Publication date Jul 30, 2020
- TOKYO ELECTRON LIMITED
- Tadashi Aoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK DEVICE
- Publication number 20140376148
- Publication date Dec 25, 2014
- Yasuharu Sasaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MOUNTING TABLE AND PLASMA PROCESSING APPARATUS
- Publication number 20140346152
- Publication date Nov 27, 2014
- TOKYO ELECTRON LIMITED
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING APPARATUS
- Publication number 20140069585
- Publication date Mar 13, 2014
- TOKYO ELECTRON LIMITED
- Tadashi AOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE TREATMENT METHOD
- Publication number 20080280536
- Publication date Nov 13, 2008
- TOKYO ELECTRON LIMITED
- Yasuharu Sasaki
- B24 - GRINDING POLISHING
Information Patent Application
SURFACE PROCESSING METHOD FOR MOUNTING STAGE
- Publication number 20080237030
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Tadashi Aoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE MOUNTING STAGE AND SURFACE TREATMENT METHOD THEREFOR
- Publication number 20080217291
- Publication date Sep 11, 2008
- TOKYO ELECTRON LIMITED
- Masakazu HIGUMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing device and method of maintaining the device, mechanism a...
- Publication number 20050150456
- Publication date Jul 14, 2005
- TOKYO ELECTRON LIMITED
- Shigeru Senzaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing device and method of maintaining the device, mechanism a...
- Publication number 20040108068
- Publication date Jun 10, 2004
- Shigeru Senzaki
- H01 - BASIC ELECTRIC ELEMENTS

Tadashi Aoto

Person

Patents Grantslast 30 patents

Plasma etching apparatus

Mounting table and plasma processing apparatus

Electrostatic chuck device

Substrate mounting stage and surface treatment method therefor

Surface processing method for mounting stage

Surface treatment method

Processing device and method of maintaining the device, mechanism a...

Processing device and method of maintaining the device, mechanism a...

Patents Applicationslast 30 patents

SUSCEPTOR, SUBSTRATE PROCESSING APPARATUS AND PROTECTION METHOD

ELECTROSTATIC CHUCK DEVICE

MOUNTING TABLE AND PLASMA PROCESSING APPARATUS

PLASMA ETCHING APPARATUS

SURFACE TREATMENT METHOD

SURFACE PROCESSING METHOD FOR MOUNTING STAGE

SUBSTRATE MOUNTING STAGE AND SURFACE TREATMENT METHOD THEREFOR

Processing device and method of maintaining the device, mechanism a...

Processing device and method of maintaining the device, mechanism a...