Tadashi Arai

Person

Utsunomiya, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Mask data generation method
- Patent number 10,282,487
- Issue date May 7, 2019
- Canon Kabushiki Kaisha
- Tadashi Arai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for generating pattern, storage medium, and information proc...
- Patent number 9,811,623
- Issue date Nov 7, 2017
- Canon Kabushiki Kaisha
- Hiroyuki Ishii
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern generation method
- Patent number 9,672,300
- Issue date Jun 6, 2017
- Canon Kabushiki Kaisha
- Koji Mikami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask pattern generating method, storage medium, information process...
- Patent number 9,569,576
- Issue date Feb 14, 2017
- Canon Kabushiki Kaisha
- Tadashi Arai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for evaluating optical image of pattern, recording medium, a...
- Patent number 9,547,230
- Issue date Jan 17, 2017
- Canon Kabushiki Kaisha
- Koji Mikami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern formation method that includes partially removing line and...
- Patent number 9,502,306
- Issue date Nov 22, 2016
- Canon Kabushiki Kaisha
- Koichiro Tsujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask pattern generation method
- Patent number 9,372,408
- Issue date Jun 21, 2016
- Canon Kabushiki Kaisha
- Tadashi Arai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for creating mask data, program, information processing appa...
- Patent number 8,945,801
- Issue date Feb 3, 2015
- Canon Kabushiki Kaisha
- Ryo Nakayama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Evaluation method, adjustment method, exposure apparatus, and memor...
- Patent number 8,941,813
- Issue date Jan 27, 2015
- Canon Kabushiki Kaisha
- Tadashi Arai
- G02 - OPTICS
Information Patent Grant
Generation method, storage medium and information processing apparatus
- Patent number 8,943,446
- Issue date Jan 27, 2015
- Canon Kabushiki Kaisha
- Tadashi Arai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Generation method, storage medium, and information processing appar...
- Patent number 8,756,536
- Issue date Jun 17, 2014
- Canon Kabushiki Kaisha
- Tadashi Arai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Decision method, storage medium and information processing apparatus
- Patent number 8,701,053
- Issue date Apr 15, 2014
- Canon Kabushiki Kaisha
- Tadashi Arai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Evaluation method, control method, exposure apparatus, and memory m...
- Patent number 8,520,190
- Issue date Aug 27, 2013
- Canon Kabushiki Kaisha
- Tadashi Arai
- G01 - MEASURING TESTING
Information Patent Grant
Program storage medium and method for determining exposure conditio...
- Patent number 8,321,816
- Issue date Nov 27, 2012
- Canon Kabushiki Kaisha
- Tadashi Arai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 8,035,804
- Issue date Oct 11, 2011
- Canon Kabushiki Kaisha
- Tadashi Arai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Motor driven exposure adjusting device
- Patent number 4,922,274
- Issue date May 1, 1990
- Canon Kabushiki Kaisha/Canon Denshi Kabushiki Kaisha
- Hiroshi Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure amount adjusting device
- Patent number 4,897,681
- Issue date Jan 30, 1990
- Canon Kabushiki Kaisha
- Hiroshi Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PATTERN FORMATION METHOD
- Publication number 20160035628
- Publication date Feb 4, 2016
- Canon Kabushiki Kaisha
- Koichiro Tsujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR GENERATING PATTERN, STORAGE MEDIUM, AND INFORMATION PROC...
- Publication number 20160026743
- Publication date Jan 28, 2016
- Canon Kabushiki Kaisha
- Hiroyuki Ishii
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OPERATION METHOD AND APPARATUS FOR PERFORMING LITHOGRAPHY-RELATED S...
- Publication number 20150356214
- Publication date Dec 10, 2015
- Canon Kabushiki Kaisha
- Tadashi Arai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MASK DATA GENERATING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...
- Publication number 20150213175
- Publication date Jul 30, 2015
- Canon Kabushiki Kaisha
- Tadashi Arai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MASK PATTERN GENERATION METHOD
- Publication number 20150178431
- Publication date Jun 25, 2015
- Canon Kabushiki Kaisha
- Tadashi Arai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR EVALUATING OPTICAL IMAGE OF PATTERN, RECORDING MEDIUM, A...
- Publication number 20150177609
- Publication date Jun 25, 2015
- Canon Kabushiki Kaisha
- Koji Mikami
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
GENERATION METHOD, STORAGE MEDIUM AND INFORMATION PROCESSING APPARATUS
- Publication number 20140245241
- Publication date Aug 28, 2014
- Canon Kabushiki Kaisha
- Tadashi ARAI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR CREATING MASK DATA, PROGRAM, INFORMATION PROCESSING APPA...
- Publication number 20140080041
- Publication date Mar 20, 2014
- Canon Kabushiki Kaisha
- Ryo Nakayama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN GENERATION METHOD
- Publication number 20130329202
- Publication date Dec 12, 2013
- Koji Mikami
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MASK DATA GENERATION METHOD
- Publication number 20130321789
- Publication date Dec 5, 2013
- Canon Kabushiki Kaisha
- Tadashi Arai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DECISION METHOD, STORAGE MEDIUM AND INFORMATION PROCESSING APPARATUS
- Publication number 20130268902
- Publication date Oct 10, 2013
- Canon Kabushiki Kaisha
- Tadashi Arai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
GENERATION METHOD, STORAGE MEDIUM, AND INFORMATION PROCESSING APPAR...
- Publication number 20130246982
- Publication date Sep 19, 2013
- Canon Kabushiki Kaisha
- Tadashi Arai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROGRAM STORAGE MEDIUM AND METHOD FOR DETERMINING EXPOSURE CONDITIO...
- Publication number 20120096413
- Publication date Apr 19, 2012
- Canon Kabushiki Kaisha
- Tadashi Arai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EVALUATION METHOD, ADJUSTMENT METHOD, EXPOSURE APPARATUS, AND MEMOR...
- Publication number 20090201480
- Publication date Aug 13, 2009
- Canon Kabushiki Kaisha
- Tadashi Arai
- G02 - OPTICS
Information Patent Application
EVALUATION METHOD, CONTROL METHOD, EXPOSURE APPARATUS, AND MEMORY M...
- Publication number 20090180093
- Publication date Jul 16, 2009
- Canon Kabushiki Kaisha
- Tadashi Arai
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20080259307
- Publication date Oct 23, 2008
- Canon Kabushiki Kaisha
- Tadashi Arai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tadashi Arai

Person

Patents Grantslast 30 patents

Mask data generation method

Method for generating pattern, storage medium, and information proc...

Pattern generation method

Mask pattern generating method, storage medium, information process...

Method for evaluating optical image of pattern, recording medium, a...

Pattern formation method that includes partially removing line and...

Mask pattern generation method

Method for creating mask data, program, information processing appa...

Evaluation method, adjustment method, exposure apparatus, and memor...

Generation method, storage medium and information processing apparatus

Generation method, storage medium, and information processing appar...

Decision method, storage medium and information processing apparatus

Evaluation method, control method, exposure apparatus, and memory m...

Program storage medium and method for determining exposure conditio...

Exposure apparatus and device manufacturing method

Motor driven exposure adjusting device

Exposure amount adjusting device

Patents Applicationslast 30 patents

PATTERN FORMATION METHOD

METHOD FOR GENERATING PATTERN, STORAGE MEDIUM, AND INFORMATION PROC...

OPERATION METHOD AND APPARATUS FOR PERFORMING LITHOGRAPHY-RELATED S...

MASK DATA GENERATING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...

MASK PATTERN GENERATION METHOD

METHOD FOR EVALUATING OPTICAL IMAGE OF PATTERN, RECORDING MEDIUM, A...

GENERATION METHOD, STORAGE MEDIUM AND INFORMATION PROCESSING APPARATUS

METHOD FOR CREATING MASK DATA, PROGRAM, INFORMATION PROCESSING APPA...

PATTERN GENERATION METHOD

MASK DATA GENERATION METHOD

DECISION METHOD, STORAGE MEDIUM AND INFORMATION PROCESSING APPARATUS

GENERATION METHOD, STORAGE MEDIUM, AND INFORMATION PROCESSING APPAR...

PROGRAM STORAGE MEDIUM AND METHOD FOR DETERMINING EXPOSURE CONDITIO...

EVALUATION METHOD, ADJUSTMENT METHOD, EXPOSURE APPARATUS, AND MEMOR...

EVALUATION METHOD, CONTROL METHOD, EXPOSURE APPARATUS, AND MEMORY M...

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD