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Tadashi ENOMOTO
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Iwate, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Transfer method and transfer system for transferring substrate betw...
Patent number
11,908,717
Issue date
Feb 20, 2024
Tokyo Electron Limited
Masakazu Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetizing apparatus and magnetizing method
Patent number
10,096,416
Issue date
Oct 9, 2018
Tokyo Electron Limited
Tadashi Enomoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetic annealing apparatus and magnetic annealing method
Patent number
9,851,149
Issue date
Dec 26, 2017
Tokyo Electron Limited
Mitsuru Yamazaki
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Vacuum processing apparatus and vacuum processing method
Patent number
9,349,589
Issue date
May 24, 2016
Tokyo Electron Limited
Tadashi Enomoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and film deposition apparatus
Patent number
9,136,156
Issue date
Sep 15, 2015
Tokyo Electron Limited
Tadashi Enomoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
INFORMATION COLLECTION DEVICE
Publication number
20240255928
Publication date
Aug 1, 2024
TOKYO ELECTRON LIMITED
Yutai MATSUHASHI
G05 - CONTROLLING REGULATING
Information
Patent Application
INFORMATION PROCESSING SYSTEM, POWER ADJUSTMENT METHOD, AND HEAT TR...
Publication number
20240063034
Publication date
Feb 22, 2024
TOKYO ELECTRON LIMITED
Masakazu YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INFORMATION PROCESSING SYSTEM, ABNORMALITY DETECTION METHOD, AND HE...
Publication number
20240061413
Publication date
Feb 22, 2024
TOKYO ELECTRON LIMITED
Masakazu YAMAMOTO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND IMAGE CAPTURING METHOD
Publication number
20230154776
Publication date
May 18, 2023
TOKYO ELECTRON LIMITED
Tadashi ENOMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND TEMPERATURE CONTROL METHOD
Publication number
20220390288
Publication date
Dec 8, 2022
TOKYO ELECTRON LIMITED
Tadashi ENOMOTO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INFORMATION PROCESSING APPARATUS, SIMULATION METHOD, AND INFORMATIO...
Publication number
20220391562
Publication date
Dec 8, 2022
TOKYO ELECTRON LIMITED
Tadashi ENOMOTO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MEASUREMENT JIG AND PROCESSING METHOD
Publication number
20220392791
Publication date
Dec 8, 2022
TOKYO ELECTRON LIMITED
Masakazu YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INFORMATION PROCESSING APPARATUS, TRANSFER POSITION CORRECTION METH...
Publication number
20220388785
Publication date
Dec 8, 2022
TOKYO ELECTRON LIMITED
Tadashi ENOMOTO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
INFORMATION PROCESSING APPARATUS, TRANSFER POSITION TEACHING METHOD...
Publication number
20220383536
Publication date
Dec 1, 2022
TOKYO ELECTRON LIMITED
Tadashi ENOMOTO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
INFORMATION PROCESSING SYSTEM, TEMPERATURE CONTROL METHOD, AND HEAT...
Publication number
20220344180
Publication date
Oct 27, 2022
TOKYO ELECTRON LIMITED
Hiroyuki KARASAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING SYSTEM, AN...
Publication number
20220207492
Publication date
Jun 30, 2022
TOKYO ELECTRON LIMITED
Masakazu YAMAMOTO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
TEACHING METHOD AND TRANSFER SYSTEM
Publication number
20210398342
Publication date
Dec 23, 2021
TOKYO ELECTRON LIMITED
Masakazu YAMAMOTO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
INFORMATION PROCESSING SYSTEM AND SIMULATION METHOD
Publication number
20210264076
Publication date
Aug 26, 2021
TOKYO ELECTRON LIMITED
Masakazu YAMAMOTO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
TRANSFER METHOD AND TRANSFER SYSTEM
Publication number
20200381281
Publication date
Dec 3, 2020
TOKYO ELECTRON LIMITED
Masakazu YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAGNETIZING APPARATUS AND MAGNETIZING METHOD
Publication number
20170062112
Publication date
Mar 2, 2017
TOKYO ELECTRON LIMITED
Tadashi Enomoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAGNETIC ANNEALING APPARATUS AND MAGNETIC ANNEALING METHOD
Publication number
20160061525
Publication date
Mar 3, 2016
TOKYO ELECTRON LIMITED
Mitsuru Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS AND VACUUM PROCESSING METHOD
Publication number
20150203965
Publication date
Jul 23, 2015
TOKYO ELECTRON LIMITED
Tadashi ENOMOTO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND FILM DEPOSITION APPARATUS
Publication number
20130061804
Publication date
Mar 14, 2013
TOKYO ELECTRON LIMITED
Tadashi ENOMOTO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND FILM DEPOSITION APPARATUS
Publication number
20130047924
Publication date
Feb 28, 2013
TOKYO ELECTRON LIMITED
Tadashi Enomoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...