Tadashi Ikeda

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Kawasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate support apparatus and vacuum processing apparatus
- Patent number 8,920,107
- Issue date Dec 30, 2014
- Canon Anelva Corporation
- Tadashi Ikeda
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SUPPORT APPARATUS AND VACUUM PROCESSING APPARATUS
- Publication number 20110286826
- Publication date Nov 24, 2011
- Canon ANELVA Corporation
- Tadashi Ikeda
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS