Tadashi Inokuchi

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Yasu, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chucking stage and substrate processing apparatus
- Patent number RE42175
- Issue date Mar 1, 2011
- Canon Anelva Corporation
- Yasumi Sago
- 118 - Coating apparatus
Information Patent Grant
Electrostatic chucking stage and substrate processing apparatus
- Patent number 7,220,319
- Issue date May 22, 2007
- Canon Anelva Corporation
- Yasumi Sago
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Layered ceramic/metallic assembly, and an electrostatic chuck using...
- Patent number 6,535,371
- Issue date Mar 18, 2003
- Takashi Kayamoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Electrostatic chucking stage and substrate processing apparatus
- Publication number 20030222416
- Publication date Dec 4, 2003
- Yasumi Sago
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS