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Batch-Type Remote Plasma Processing Apparatus
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Publication number 20130104804
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Publication date May 2, 2013
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Hitachi Kokusai Electric Inc.
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Kazuyuki TOYODA
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Batch-Type Remote Plasma Processing Apparatus
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Publication number 20130072002
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Publication date Mar 21, 2013
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Hitachi Kokusai Electric Inc.
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Kazuyuki TOYODA
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SUBSTRATE PROCESSING APPARATUS
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Publication number 20110209664
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Publication date Sep 1, 2011
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Shizue Ogawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate Processing Apparatus
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Publication number 20090255468
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Publication date Oct 15, 2009
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Hitachi Kokusai Electric Inc.
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Tetsuo Yamamoto
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing apparatus
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Publication number 20090241835
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Publication date Oct 1, 2009
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Hitachi Kokusai Electric Inc.
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Tadashi Kontani
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Batch-Type Remote Plasma Processing Apparatus
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Publication number 20090159440
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Publication date Jun 25, 2009
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Hitachi Kokusai Electric Inc.
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Kazuyuki Toyoda
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Batch-Type Remote Plasma Processing Apparatus
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Publication number 20090133630
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Publication date May 28, 2009
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Hitachi Kokusai Electric Inc.
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Kazuyuki Toyoda
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate Processing Apparatus
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Publication number 20080153308
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Publication date Jun 26, 2008
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Hitachi Kokusai Electric Inc.
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Shizue Ogawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Batch-Type Remote Plasma Processing Apparatus
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Publication number 20080093215
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Publication date Apr 24, 2008
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Hitachi Kokusai Electric Inc.
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Kazuyuki Toyoda
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Batch-Type Remote Plasma Processing Apparatus
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Publication number 20080066681
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Publication date Mar 20, 2008
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Hitachi Kokusai Electric Inc.
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Kazuyuki Toyoda
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Batch-Type Remote Plasma Processing Apparatus
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Publication number 20080060580
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Publication date Mar 13, 2008
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Hitachi Kokusai Electric Inc.
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Kazuyuki Toyoda
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Batch-Type Remote Plasma Processing Apparatus
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Publication number 20070246355
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Publication date Oct 25, 2007
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Hitachi Kokusai Electric Inc.
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Kazuyuki Toyoda
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Batch-type remote plasma processing apparatus
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Publication number 20030164143
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Publication date Sep 4, 2003
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Hitachi Kokusai Electric Inc.
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Kazuyuki Toyoda
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...