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Tadashi Konuki
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Tokyo, JP
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last 30 patents
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Patent Grant
Semiconductor circuit manufacturing apparatus having selectively op...
Patent number
4,719,357
Issue date
Jan 12, 1988
Canon Kabushiki Kaisha
Naoki Ayata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask aligner having a malfunction disposal device
Patent number
4,553,834
Issue date
Nov 19, 1985
Canon Kabushiki Kaisha
Naoki Ayata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Step type mask aligner
Patent number
4,530,587
Issue date
Jul 23, 1985
Canon Kabushiki Kaisha
Masao Kosugi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY