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Tadashi Matsuo
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Kukishi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Reflective photomask and reflective photomask blank
Patent number
8,962,220
Issue date
Feb 24, 2015
Toppan Printing Co., Ltd.
Tadashi Matsuo
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Reflection type photomask blank, manufacturing method thereof, refl...
Patent number
8,394,558
Issue date
Mar 12, 2013
Toppan Printing Co., Ltd.
Tadashi Matsuo
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Reflection type photomask blank, reflection type photomask, and met...
Patent number
7,838,177
Issue date
Nov 23, 2010
Toppan Printing Co., Ltd.
Koichiro Kanayama
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Halftone phase shift mask, blank for the same, and methods of manuf...
Patent number
5,935,735
Issue date
Aug 10, 1999
Toppan Printing Co., Ltd.
Kinji Okubo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
REFLECTIVE PHOTOMASK AND REFLECTIVE PHOTOMASK BLANK
Publication number
20120021344
Publication date
Jan 26, 2012
Tadashi Matsuo
B82 - NANO-TECHNOLOGY
Information
Patent Application
Reflection type photomask blank, manufacturing method thereof, refl...
Publication number
20090042110
Publication date
Feb 12, 2009
Toppan Printing Co., Ltd.
Tadashi Matsuo
B82 - NANO-TECHNOLOGY
Information
Patent Application
Reflection type photomask blank, reflection type photomask, and met...
Publication number
20070238033
Publication date
Oct 11, 2007
Toppan Printing Co., Ltd.
Koichiro Kanayama
B82 - NANO-TECHNOLOGY