Tadashi Mitsunari

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Etching method
- Patent number 11,721,557
- Issue date Aug 8, 2023
- Tokyo Electron Limited
- Tadashi Mitsunari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 11,658,008
- Issue date May 23, 2023
- Tokyo Electron Limited
- Munehito Kagaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature measurement substrate and temperature measurement system
- Patent number 11,035,741
- Issue date Jun 15, 2021
- Tokyo Electron Limited
- Tadashi Mitsunari
- G01 - MEASURING TESTING
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 10,643,839
- Issue date May 5, 2020
- Tokyo Electron Limited
- Ayuta Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING CARBON-CONTAINING FILM, AND METHOD FOR FORMING H...
- Publication number 20240392432
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Miyako KANEKO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING DEVICE
- Publication number 20240263306
- Publication date Aug 8, 2024
- TOKYO ELECTRON LIMITED
- Shuji AZUMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
- Publication number 20240258086
- Publication date Aug 1, 2024
- TOKYO ELECTRON LIMITED
- Tadashi MITSUNARI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240044006
- Publication date Feb 8, 2024
- TOKYO ELECTRON LIMITED
- Hiroki ARAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20230243031
- Publication date Aug 3, 2023
- TOKYO ELECTRON LIMITED
- Sena FUJITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20220411920
- Publication date Dec 29, 2022
- Tokyo Electron Limited
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20210384009
- Publication date Dec 9, 2021
- TOKYO ELECTRON LIMITED
- Satoru KAWAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210375589
- Publication date Dec 2, 2021
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METHOD
- Publication number 20210351040
- Publication date Nov 11, 2021
- Tadashi MITSUNARI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210301402
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Yusuke SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE MEASUREMENT SUBSTRATE AND TEMPERATURE MEASUREMENT SYSTEM
- Publication number 20190120703
- Publication date Apr 25, 2019
- TOKYO ELECTRON LIMITED
- Tadashi MITSUNARI
- G01 - MEASURING TESTING
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20180158671
- Publication date Jun 7, 2018
- Ayuta SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY AND EXHAUST STRUCTURE
- Publication number 20180155830
- Publication date Jun 7, 2018
- Ayuta SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Tadashi Mitsunari

Person

Patents Grantslast 30 patents

Etching method

Film forming apparatus and film forming method

Temperature measurement substrate and temperature measurement system

Film forming apparatus and film forming method

Patents Applicationslast 30 patents

METHOD FOR FORMING CARBON-CONTAINING FILM, AND METHOD FOR FORMING H...

FILM FORMING METHOD AND FILM FORMING DEVICE

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

FILM FORMING APPARATUS AND FILM FORMING METHOD

ETCHING METHOD

FILM FORMING APPARATUS AND FILM FORMING METHOD

TEMPERATURE MEASUREMENT SUBSTRATE AND TEMPERATURE MEASUREMENT SYSTEM

FILM FORMING APPARATUS AND FILM FORMING METHOD

GAS SUPPLY AND EXHAUST STRUCTURE