Tadashi Mitui

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Stage having electrostatic chuck and plasma processing apparatus us...
- Patent number 5,382,311
- Issue date Jan 17, 1995
- Tokyo Electron Limited
- Kenji Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...