Tadashi Miyagi

Follow

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
System for manufacturing semiconductor device utilizing photolithog...
- Patent number 6,514,122
- Issue date Feb 4, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Takayuki Saito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor manufacturing device and method of processing wafer
- Patent number 6,217,319
- Issue date Apr 17, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device having a fine patter...
- Patent number 6,180,320
- Issue date Jan 30, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Takayuki Saito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Semiconductor manufacturing apparatus and manufacturing method for...
- Publication number 20030188686
- Publication date Oct 9, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Tadashi Miyagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System for manufacturing semiconductor device utilizing photolithog...
- Publication number 20020048857
- Publication date Apr 25, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Takayuki Saito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY