Tadashi MIYAGI

Person

Kyoto-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Current measurement method
- Patent number 12,123,848
- Issue date Oct 22, 2024
- Osaka University
- Masateru Taniguchi
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,400,480
- Issue date Aug 2, 2022
- SCREEN Holdings Co., Ltd.
- Takehiro Wajiki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method
- Patent number 10,684,548
- Issue date Jun 16, 2020
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Exposure device and substrate processing apparatus
- Patent number 10,236,200
- Issue date Mar 19, 2019
- SCREEN Holdings Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing method
- Patent number 10,185,219
- Issue date Jan 22, 2019
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method for drying a substrate by discharging g...
- Patent number 10,134,610
- Issue date Nov 20, 2018
- Screen Semiconductor Solutions Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,047,441
- Issue date Aug 14, 2018
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko Harumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Negative developing method and negative developing apparatus
- Patent number 10,042,262
- Issue date Aug 7, 2018
- SCREEN Holdings Co., Ltd.
- Tadashi Miyagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure device, substrate processing apparatus, exposure method fo...
- Patent number 9,972,516
- Issue date May 15, 2018
- SCREEN Holdings Co., Ltd.
- Tadashi Miyagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,828,676
- Issue date Nov 28, 2017
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko Harumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method
- Patent number 9,477,162
- Issue date Oct 25, 2016
- Screen Semiconductor Solutions Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,375,748
- Issue date Jun 28, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko Harumoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Negative developing method and negative developing apparatus
- Patent number 9,063,429
- Issue date Jun 23, 2015
- SCREEN Semiconductor Solutions Co., Ltd.
- Tadashi Miyagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate cleaning method and substrate cleaning device
- Patent number 9,028,621
- Issue date May 12, 2015
- SCREEN Semiconductor Solutions Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 8,932,672
- Issue date Jan 13, 2015
- Screen Semiconductor Solutions Co., Ltd.
- Koji Kaneyama
- G11 - INFORMATION STORAGE
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,894,775
- Issue date Nov 25, 2014
- Screen Semiconductor Solutions Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,585,830
- Issue date Nov 19, 2013
- Sokudo Co., Ltd.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method
- Patent number 8,540,824
- Issue date Sep 24, 2013
- Sokudo Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,496,761
- Issue date Jul 30, 2013
- Sokudo Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method
- Patent number 8,356,424
- Issue date Jan 22, 2013
- Dainippon Screen Mfg. Co., Ltd.
- Koji Kaneyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 8,286,576
- Issue date Oct 16, 2012
- Sokudo Co., Ltd.
- Osamu Tamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus with multi-speed drying having rinse...
- Patent number 8,218,124
- Issue date Jul 10, 2012
- Sokudo Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 8,040,488
- Issue date Oct 18, 2011
- Sokudo Co., Ltd.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,034,190
- Issue date Oct 11, 2011
- Sokudo Co., Ltd.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus
- Patent number 7,604,424
- Issue date Oct 20, 2009
- Sokudo Co., Ltd.
- Kazuhito Shigemori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,497,633
- Issue date Mar 3, 2009
- Sokudo Co., Ltd.
- Koji Kaneyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CURRENT MEASUREMENT METHOD
- Publication number 20220187244
- Publication date Jun 16, 2022
- OSAKA UNIVERSITY
- Masateru TANIGUCHI
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210213480
- Publication date Jul 15, 2021
- SCREEN Holdings Co., Ltd.
- Takehiro WAJIKI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DEVELOPING METHOD
- Publication number 20190107780
- Publication date Apr 11, 2019
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180044795
- Publication date Feb 15, 2018
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko HARUMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160289839
- Publication date Oct 6, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko HARUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXPOSURE DEVICE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160279651
- Publication date Sep 29, 2016
- SCREEN Holdings Co., Ltd.
- Tadashi MIYAGI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD FO...
- Publication number 20160282725
- Publication date Sep 29, 2016
- SCREEN Holdings Co., Ltd.
- Tadashi MIYAGI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
NEGATIVE DEVELOPING METHOD AND NEGATIVE DEVELOPING APPARATUS
- Publication number 20160282722
- Publication date Sep 29, 2016
- SCREEN Holdings Co., Ltd.
- Tadashi MIYAGI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20160203997
- Publication date Jul 14, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING METHOD
- Publication number 20160195811
- Publication date Jul 7, 2016
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20150086923
- Publication date Mar 26, 2015
- SCREEN Semiconductor Solutions Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
NEGATIVE DEVELOPING METHOD AND NEGATIVE DEVELOPING APPARATUS
- Publication number 20140199638
- Publication date Jul 17, 2014
- SOKUDO CO., LTD.
- Tadashi MIYAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140120477
- Publication date May 1, 2014
- Sokudo Co., Ltd.
- Shuichi Yasuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20140022521
- Publication date Jan 23, 2014
- Masahiko HARUMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD AND SYSTEM FOR REMOVAL OF FILMS FROM PERIPHERAL PORTIONS OF...
- Publication number 20120037593
- Publication date Feb 16, 2012
- SOKUDO CO., LTD.
- Tadashi Miyagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING DEVICE
- Publication number 20120006361
- Publication date Jan 12, 2012
- Tadashi MIYAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100285225
- Publication date Nov 11, 2010
- Dainippon Screen Mfg. Co., Ltd.
- Koji Kaneyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100239986
- Publication date Sep 23, 2010
- Sokudo Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20100190116
- Publication date Jul 29, 2010
- SOKUDO CO., LTD.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20100159142
- Publication date Jun 24, 2010
- SOKUDO CO., LTD.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20100136492
- Publication date Jun 3, 2010
- SOKUDO CO., LTD.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100136257
- Publication date Jun 3, 2010
- SOKUDO CO., LTD.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100129526
- Publication date May 27, 2010
- SOKUDO CO., LTD.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100081097
- Publication date Apr 1, 2010
- Sokudo Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100075054
- Publication date Mar 25, 2010
- Sokudo Co., Ltd.
- Koji Kaneyama
- G11 - INFORMATION STORAGE
Information Patent Application
Substrate Processing Apparatus
- Publication number 20090269936
- Publication date Oct 29, 2009
- SOKUDO CO., LTD.
- Osamu Tamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTI-SPEED SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING...
- Publication number 20090071940
- Publication date Mar 19, 2009
- SOKUDO CO., LTD.
- Tadashi Miyagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20090074402
- Publication date Mar 19, 2009
- SOKUDO CO., LTD.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
- Publication number 20090070946
- Publication date Mar 19, 2009
- SOKUDO CO., LTD.
- Osamu Tamada
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS WITH MULTI-SPEED DRYING
- Publication number 20090073394
- Publication date Mar 19, 2009
- SOKUDO CO., LTD.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS

Tadashi MIYAGI

Person

Patents Grantslast 30 patents

Current measurement method

Substrate processing apparatus and substrate processing method

Developing method

Exposure device and substrate processing apparatus

Developing method

Substrate processing method for drying a substrate by discharging g...

Substrate processing apparatus and substrate processing method

Negative developing method and negative developing apparatus

Exposure device, substrate processing apparatus, exposure method fo...

Substrate processing apparatus and substrate processing method

Substrate processing method

Substrate processing apparatus and substrate processing method

Negative developing method and negative developing apparatus

Substrate cleaning method and substrate cleaning device

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing method

Substrate processing apparatus

Substrate processing apparatus with multi-speed drying having rinse...

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Patents Applicationslast 30 patents

CURRENT MEASUREMENT METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DEVELOPING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

EXPOSURE DEVICE AND SUBSTRATE PROCESSING APPARATUS

EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD FO...

NEGATIVE DEVELOPING METHOD AND NEGATIVE DEVELOPING APPARATUS

SUBSTRATE PROCESSING METHOD

DEVELOPING METHOD

SUBSTRATE PROCESSING METHOD

NEGATIVE DEVELOPING METHOD AND NEGATIVE DEVELOPING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHOD AND SYSTEM FOR REMOVAL OF FILMS FROM PERIPHERAL PORTIONS OF...

SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING DEVICE

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

Substrate Processing Apparatus

MULTI-SPEED SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE

SUBSTRATE PROCESSING APPARATUS WITH MULTI-SPEED DRYING