Tadashi Nagayama

Person

Toshimaku, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 10,209,623
- Issue date Feb 19, 2019
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detection apparatus, exposure apparatus, and expos...
- Patent number 9,927,713
- Issue date Mar 27, 2018
- Nikon Corporation
- Yasuhiro Hidaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detection apparatus, exposure apparatus, and expos...
- Patent number 9,519,223
- Issue date Dec 13, 2016
- Nikon Corporation
- Yasuhiro Hidaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 9,383,656
- Issue date Jul 5, 2016
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detection apparatus, exposure apparatus, and expos...
- Patent number 9,069,261
- Issue date Jun 30, 2015
- Nikon Corporation
- Yasuhiro Hidaka
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 9,063,438
- Issue date Jun 23, 2015
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 8,384,875
- Issue date Feb 26, 2013
- Nikon Corporation
- Yasuhiro Hidaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detection apparatus, exposure apparatus, and expos...
- Patent number 8,149,382
- Issue date Apr 3, 2012
- Nikon Corporation
- Yasuhiro Hidaka
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 8,130,361
- Issue date Mar 6, 2012
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 5,872,618
- Issue date Feb 16, 1999
- Nikon Corporation
- Tadashi Nagayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system, alignment apparatus, and projection ex...
- Patent number 5,797,674
- Issue date Aug 25, 1998
- Nikon Corporation
- Tadashi Nagayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus having function of detecting intensit...
- Patent number 5,798,838
- Issue date Aug 25, 1998
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection apparatus and method for optical system, exposure appara...
- Patent number 5,754,299
- Issue date May 19, 1998
- Nikon Corporation
- Ayako Sugaya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection apparatus and method for optical system, exposure appara...
- Patent number 5,680,200
- Issue date Oct 21, 1997
- Nikon Corporation
- Ayako Sugaya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system, alignment apparatus, and projection ex...
- Patent number 5,552,892
- Issue date Sep 3, 1996
- Nikon Corporation
- Tadashi Nagayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20190155168
- Publication date May 23, 2019
- Nikon Corporation
- Masahiko YASUDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SURFACE POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND EXPOS...
- Publication number 20180188657
- Publication date Jul 5, 2018
- Nikon Corporation
- Yasuhiro Hidaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SURFACE POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND EXPOS...
- Publication number 20170075227
- Publication date Mar 16, 2017
- Nikon Corporation
- Yasuhiro HIDAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20160313650
- Publication date Oct 27, 2016
- Nikon Corporation
- Masahiko YASUDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SURFACE POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND EXPOS...
- Publication number 20150248064
- Publication date Sep 3, 2015
- Nikon Corporation
- Yasuhiro HIDAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20150227058
- Publication date Aug 13, 2015
- Nikon Corporation
- Masahiko YASUDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SURFACE POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND EXPOS...
- Publication number 20120162623
- Publication date Jun 28, 2012
- NIKON CORPORATION
- Yasuhiro Hidaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20120120381
- Publication date May 17, 2012
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Surface Position Detection Apparatus, Exposure Apparatus, and Expos...
- Publication number 20100129739
- Publication date May 27, 2010
- Yasuhiro Hidaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and method for producing device
- Publication number 20100079743
- Publication date Apr 1, 2010
- Nikon Corporation
- Yasuhiro Hidaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING D...
- Publication number 20090123874
- Publication date May 14, 2009
- Tadashi NAGAYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and method for producing device
- Publication number 20060187432
- Publication date Aug 24, 2006
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OBSERVATION APPARATUS AND METHOD OF MANUFACTURING THE SAME, EXPOSUR...
- Publication number 20040027549
- Publication date Feb 12, 2004
- Tadashi Nagayama
- G02 - OPTICS

Tadashi Nagayama

Person

Patents Grantslast 30 patents

Exposure apparatus, exposure method, and method for producing device

Surface position detection apparatus, exposure apparatus, and expos...

Surface position detection apparatus, exposure apparatus, and expos...

Exposure apparatus, exposure method, and method for producing device

Surface position detection apparatus, exposure apparatus, and expos...

Exposure apparatus, exposure method, and method for producing device

Exposure apparatus, exposure method, and method for producing device

Surface position detection apparatus, exposure apparatus, and expos...

Exposure apparatus, exposure method, and method for producing device

Projection exposure apparatus

Illumination optical system, alignment apparatus, and projection ex...

Projection exposure apparatus having function of detecting intensit...

Inspection apparatus and method for optical system, exposure appara...

Inspection apparatus and method for optical system, exposure appara...

Illumination optical system, alignment apparatus, and projection ex...

Patents Applicationslast 30 patents

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

SURFACE POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND EXPOS...

SURFACE POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND EXPOS...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

SURFACE POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND EXPOS...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

SURFACE POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND EXPOS...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

Surface Position Detection Apparatus, Exposure Apparatus, and Expos...

Exposure apparatus, exposure method, and method for producing device

EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING D...

Exposure apparatus, exposure method, and method for producing device

OBSERVATION APPARATUS AND METHOD OF MANUFACTURING THE SAME, EXPOSUR...