Tadashi Nakano

Person

Chiba-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming an insulating film having SI-C, SI-O and SI-H bon...
- Patent number 6,828,258
- Issue date Dec 7, 2004
- Kawasaki Microelectronics, Inc.
- Tadashi Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Insulating film of semiconductor device and coating solution for fo...
- Patent number 6,423,651
- Issue date Jul 23, 2002
- Kawasaki Steel Corporation
- Tadashi Nakano
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method for making metal interconnection
- Patent number 6,063,703
- Issue date May 16, 2000
- Kawasaki Steel Corporation
- Hiroshi Shinriki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating solution and method for preparing the coating solution, met...
- Patent number 5,998,522
- Issue date Dec 7, 1999
- Kawasaki Steel Corporation
- Tadashi Nakano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal interconnection and method for making
- Patent number 5,973,402
- Issue date Oct 26, 1999
- Kawasaki Steel Corporation
- Hiroshi Shinriki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating solution and method for preparing the coating solution, met...
- Patent number 5,840,821
- Issue date Nov 24, 1998
- Kawasaki Steel Corporation
- Tadashi Nakano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for making metal interconnection with chlorine plasma etch
- Patent number 5,627,102
- Issue date May 6, 1997
- Kawasaki Steel Corporation
- Hiroshi Shinriki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing insulating film of semiconductor device and...
- Patent number 5,605,867
- Issue date Feb 25, 1997
- Kawasaki Steel Corporation
- Nobuyoshi Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of chemical mechanical polishing planarization of an insulat...
- Patent number 5,532,191
- Issue date Jul 2, 1996
- Kawasaki Steel Corporation
- Tadashi Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interconnection structure for semiconductor integrated circuit and...
- Patent number 5,506,449
- Issue date Apr 9, 1996
- Kawasaki Steel Corporation
- Tadashi Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for depositing titanium nitride film by CVD
- Patent number 5,300,321
- Issue date Apr 5, 1994
- Kawasaki Steel Corporation
- Tadashi Nakano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Insulating film of semiconductor device and coating solution for fo...
- Publication number 20040209455
- Publication date Oct 21, 2004
- KAWASAKI MICROELECTRONICS, INC.
- Tadashi Nakano
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Insulating film of semiconductor device and coating solution for fo...
- Publication number 20020158310
- Publication date Oct 31, 2002
- Kawasaki Steel Corporation
- Tadashi Nakano
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...

Tadashi Nakano

Person

Patents Grantslast 30 patents

Method of forming an insulating film having SI-C, SI-O and SI-H bon...

Insulating film of semiconductor device and coating solution for fo...

Method for making metal interconnection

Coating solution and method for preparing the coating solution, met...

Metal interconnection and method for making

Coating solution and method for preparing the coating solution, met...

Method for making metal interconnection with chlorine plasma etch

Method of manufacturing insulating film of semiconductor device and...

Method of chemical mechanical polishing planarization of an insulat...

Interconnection structure for semiconductor integrated circuit and...

Process for depositing titanium nitride film by CVD

Patents Applicationslast 30 patents

Insulating film of semiconductor device and coating solution for fo...

Insulating film of semiconductor device and coating solution for fo...