Tadashi NISHIYAMA

Person

Koshi-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate imaging apparatus
- Patent number 11,832,026
- Issue date Nov 28, 2023
- Tokyo Electron Limited
- Norihisa Koga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate inspection apparatus, substrate processing apparatus, sub...
- Patent number 11,823,922
- Issue date Nov 21, 2023
- Tokyo Electron Limited
- Akiko Kiyotomi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Processing apparatus for forming a coating film on a substrate havi...
- Patent number 11,791,162
- Issue date Oct 17, 2023
- Tokyo Electron Limited
- Yasuaki Noda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Treatment condition setting method, storage medium, and substrate t...
- Patent number 11,726,438
- Issue date Aug 15, 2023
- Tokyo Electron Limited
- Takuya Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate defect inspection method, storage medium, and substrate d...
- Patent number 11,669,955
- Issue date Jun 6, 2023
- Tokyo Electron Limited
- Shin Inoue
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate inspection apparatus, substrate processing apparatus, sub...
- Patent number 11,609,502
- Issue date Mar 21, 2023
- Tokyo Electron Limited
- Akiko Kiyotomi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate inspection method, substrate inspection apparatus and rec...
- Patent number 11,378,388
- Issue date Jul 5, 2022
- Tokyo Electron Limited
- Kazuya Hisano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate imaging apparatus
- Patent number 10,958,879
- Issue date Mar 23, 2021
- Tokyo Electron Limited
- Norihisa Koga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate imaging apparatus
- Patent number 10,523,905
- Issue date Dec 31, 2019
- Tokyo Electron Limited
- Norihisa Koga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing method, substrate processing apparatus and a c...
- Patent number 10,381,221
- Issue date Aug 13, 2019
- Tokyo Electron Limited
- Yasuaki Noda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate defect inspection apparatus, method of adjusting sensitiv...
- Patent number 10,249,034
- Issue date Apr 2, 2019
- Tokyo Electron Limited
- Yasuhiro Kitada
- G01 - MEASURING TESTING
Information Patent Grant
Film thickness measurement apparatus, film thickness measurement me...
- Patent number 9,355,442
- Issue date May 31, 2016
- Tokyo Electron Limited
- Shuji Iwanaga
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Defect analyzing apparatus, substrate processing system, defect ana...
- Patent number 9,342,880
- Issue date May 17, 2016
- Tokyo Electron Limited
- Shuji Iwanaga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate reference image creation method, substrate defect inspect...
- Patent number 9,146,479
- Issue date Sep 29, 2015
- Tokyo Electron Limited
- Izumi Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate inspection apparatus and method for operating the same
- Patent number 9,025,852
- Issue date May 5, 2015
- Tokyo Electron Limited
- Kazuya Hisano
- G01 - MEASURING TESTING
Information Patent Grant
Image creation method, substrate inspection method, non-transitory...
- Patent number 8,855,402
- Issue date Oct 7, 2014
- Tokyo Electron Limited
- Hiroshi Tomita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect inspection method and computer-readable storage medium
- Patent number 8,040,500
- Issue date Oct 18, 2011
- Tokyo Electron Limited
- Kazuya Hisano
- G01 - MEASURING TESTING
Information Patent Grant
Pattern recognition method
- Patent number 4,866,782
- Issue date Sep 12, 1989
- Tokyo Electron Limited
- Kazuo Sugie
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION PROGRAM, AND SUBS...
- Publication number 20250037267
- Publication date Jan 30, 2025
- TOKYO ELECTRON LIMITED
- Tatsuya Tokumaru
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE IMAGING APPARATUS
- Publication number 20240022693
- Publication date Jan 18, 2024
- TOKYO ELECTRON LIMITED
- Norihisa KOGA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROCESSING APPARATUS FOR FORMING A COATING FILM ON A SUBSTRATE HAVI...
- Publication number 20230395380
- Publication date Dec 7, 2023
- TOKYO ELECTRON LIMITED
- Yasuaki NODA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TREATMENT CONDITION SETTING METHOD, STORAGE MEDIUM, AND SUBSTRATE T...
- Publication number 20230333531
- Publication date Oct 19, 2023
- TOKYO ELECTRON LIMITED
- Takuya MORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INSPECTION APPARATUS, SUBSTRATE INSPECTION METHOD, AND RE...
- Publication number 20230224559
- Publication date Jul 13, 2023
- TOKYO ELECTRON LIMITED
- Daisuke Kajiwara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE INSPECTION APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUB...
- Publication number 20230197480
- Publication date Jun 22, 2023
- TOKYO ELECTRON LIMITED
- Akiko Kiyotomi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE INSPECTION DEVICE, SUBSTRATE INSPECTION SYSTEM, AND SUBST...
- Publication number 20220237770
- Publication date Jul 28, 2022
- TOKYO ELECTRON LIMITED
- Shuji IWANAGA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE IMAGING APPARATUS
- Publication number 20210185282
- Publication date Jun 17, 2021
- TOKYO ELECTRON LIMITED
- Norihisa KOGA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE DEFECT INSPECTION METHOD, STORAGE MEDIUM, AND SUBSTRATE D...
- Publication number 20210166365
- Publication date Jun 3, 2021
- Tokyo Electron Limited
- Shin INOUE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TREATMENT CONDITION SETTING METHOD, STORAGE MEDIUM, AND SUBSTRATE T...
- Publication number 20200393803
- Publication date Dec 17, 2020
- Tokyo Electron Limited
- Takuya MORI
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE INSPECTION APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUB...
- Publication number 20200285156
- Publication date Sep 10, 2020
- TOKYO ELECTRON LIMITED
- Akiko Kiyotomi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION APPARATUS AND REC...
- Publication number 20200096321
- Publication date Mar 26, 2020
- TOKYO ELECTRON LIMITED
- Kazuya Hisano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE IMAGING APPARATUS
- Publication number 20200084422
- Publication date Mar 12, 2020
- TOKYO ELECTRON LIMITED
- Norihisa KOGA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND A C...
- Publication number 20190287796
- Publication date Sep 19, 2019
- TOKYO ELECTRON LIMITED
- Yasuaki NODA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE DEFECT INSPECTION APPARATUS, METHOD OF ADJUSTING SENSITIV...
- Publication number 20180005370
- Publication date Jan 4, 2018
- TOKYO ELECTRON LIMITED
- Yasuhiro Kitada
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE IMAGING APPARATUS
- Publication number 20170244936
- Publication date Aug 24, 2017
- TOKYO ELECTRON LIMITED
- Norihisa KOGA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND A C...
- Publication number 20170243738
- Publication date Aug 24, 2017
- TOKYO ELECTRON LIMITED
- Yasuaki NODA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FILM THICKNESS MEASUREMENT APPARATUS, FILM THICKNESS MEASUREMENT ME...
- Publication number 20150324970
- Publication date Nov 12, 2015
- TOKYO ELECTRON LIMITED
- Shuji IWANAGA
- G01 - MEASURING TESTING
Information Patent Application
DEFECT ANALYZING APPARATUS, SUBSTRATE PROCESSING SYSTEM, DEFECT ANA...
- Publication number 20150125068
- Publication date May 7, 2015
- TOKYO ELECTRON LIMITED
- Shuji IWANAGA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE REFERENCE IMAGE CREATION METHOD, SUBSTRATE DEFECT INSPECT...
- Publication number 20140160451
- Publication date Jun 12, 2014
- TOKYO ELECTRON LIMITED
- Izumi HASEGAWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE DEFECT INSPECTION METHOD, SUBSTRATE DEFECT INSPECTION APP...
- Publication number 20140152807
- Publication date Jun 5, 2014
- TOKYO ELECTRON LIMITED
- Shuji IWANAGA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE INSPECTION APPARATUS AND METHOD FOR OPERATING THE SAME
- Publication number 20120307045
- Publication date Dec 6, 2012
- TOKYO ELECTRON LIMITED
- Kazuya Hisano
- G01 - MEASURING TESTING
Information Patent Application
IMAGE CREATION METHOD, SUBSTRATE INSPECTION METHOD, NON-TRANSITORY...
- Publication number 20120237110
- Publication date Sep 20, 2012
- TOKYO ELECTRON LIMITED
- Hiroshi Tomita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT INSPECTION METHOD AND COMPUTER-READABLE STORAGE MEDIUM
- Publication number 20090226077
- Publication date Sep 10, 2009
- TOKYO ELECTRON LIMITED
- Kazuya HISANO
- G06 - COMPUTING CALCULATING COUNTING

Tadashi NISHIYAMA

Person

Patents Grantslast 30 patents

Substrate imaging apparatus

Substrate inspection apparatus, substrate processing apparatus, sub...

Processing apparatus for forming a coating film on a substrate havi...

Treatment condition setting method, storage medium, and substrate t...

Substrate defect inspection method, storage medium, and substrate d...

Substrate inspection apparatus, substrate processing apparatus, sub...

Substrate inspection method, substrate inspection apparatus and rec...

Substrate imaging apparatus

Substrate imaging apparatus

Substrate processing method, substrate processing apparatus and a c...

Substrate defect inspection apparatus, method of adjusting sensitiv...

Film thickness measurement apparatus, film thickness measurement me...

Defect analyzing apparatus, substrate processing system, defect ana...

Substrate reference image creation method, substrate defect inspect...

Substrate inspection apparatus and method for operating the same

Image creation method, substrate inspection method, non-transitory...

Defect inspection method and computer-readable storage medium

Pattern recognition method

Patents Applicationslast 30 patents

SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION PROGRAM, AND SUBS...

SUBSTRATE IMAGING APPARATUS

PROCESSING APPARATUS FOR FORMING A COATING FILM ON A SUBSTRATE HAVI...

TREATMENT CONDITION SETTING METHOD, STORAGE MEDIUM, AND SUBSTRATE T...

SUBSTRATE INSPECTION APPARATUS, SUBSTRATE INSPECTION METHOD, AND RE...

SUBSTRATE INSPECTION APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUB...

SUBSTRATE INSPECTION DEVICE, SUBSTRATE INSPECTION SYSTEM, AND SUBST...

SUBSTRATE IMAGING APPARATUS

SUBSTRATE DEFECT INSPECTION METHOD, STORAGE MEDIUM, AND SUBSTRATE D...

TREATMENT CONDITION SETTING METHOD, STORAGE MEDIUM, AND SUBSTRATE T...

SUBSTRATE INSPECTION APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUB...

SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION APPARATUS AND REC...

SUBSTRATE IMAGING APPARATUS

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND A C...

SUBSTRATE DEFECT INSPECTION APPARATUS, METHOD OF ADJUSTING SENSITIV...

SUBSTRATE IMAGING APPARATUS

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND A C...

FILM THICKNESS MEASUREMENT APPARATUS, FILM THICKNESS MEASUREMENT ME...

DEFECT ANALYZING APPARATUS, SUBSTRATE PROCESSING SYSTEM, DEFECT ANA...

SUBSTRATE REFERENCE IMAGE CREATION METHOD, SUBSTRATE DEFECT INSPECT...

SUBSTRATE DEFECT INSPECTION METHOD, SUBSTRATE DEFECT INSPECTION APP...

SUBSTRATE INSPECTION APPARATUS AND METHOD FOR OPERATING THE SAME

IMAGE CREATION METHOD, SUBSTRATE INSPECTION METHOD, NON-TRANSITORY...

DEFECT INSPECTION METHOD AND COMPUTER-READABLE STORAGE MEDIUM