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Tadashi OBO
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Polishing apparatus and polishing method
Patent number
9,242,339
Issue date
Jan 26, 2016
Ebara Corporation
Hisanori Matsuo
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
METHOD AND APPARATUS FOR JUDGING POLISHING PERFORMANCE OF POLISHING...
Publication number
20150346088
Publication date
Dec 3, 2015
EBARA CORPORATION
Chikako TAKATOH
G01 - MEASURING TESTING
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Patent Application
POLISHING APPARATUS AND POLISHING METHOD
Publication number
20140273753
Publication date
Sep 18, 2014
Hisanori MATSUO
B24 - GRINDING POLISHING