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Tadashi Oka
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Kanagawa, JP
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Patents Grants
last 30 patents
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Patent Grant
Device structure and method of producing the same
Patent number
10,276,827
Issue date
Apr 30, 2019
Ulvac, Inc.
Tadashi Oka
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Electrostatic chuck and vacuum processing apparatus
Patent number
8,724,288
Issue date
May 13, 2014
ULVAC, Inc.
Tadayuki Satou
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Patents Applications
last 30 patents
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Patent Application
DEVICE STRUCTURE AND METHOD OF PRODUCING THE SAME
Publication number
20160126495
Publication date
May 5, 2016
Ulvac, Inc.
Tadashi Oka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK AND VACUUM PROCESSING APPARATUS
Publication number
20110132259
Publication date
Jun 9, 2011
Tadayuki Satou
H01 - BASIC ELECTRIC ELEMENTS