Tadashi Onishi

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system and substrate cleaning apparatus includ...
- Patent number 8,132,580
- Issue date Mar 13, 2012
- Tokyo Electron Limited
- Tsuyoshi Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing an organic-film
- Patent number 7,521,098
- Issue date Apr 21, 2009
- Tokyo Electron Limited
- Kazuyuki Mitsuoka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Thin film processing method and system
- Patent number 7,195,936
- Issue date Mar 27, 2007
- Tokyo Electron Limited
- Tadashi Onishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface treating device and surface treating method
- Patent number 7,023,002
- Issue date Apr 4, 2006
- Tokyo Electron Limited
- Kazuya Nagaseki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film-processing method and film-processing apparatus
- Patent number 6,903,800
- Issue date Jun 7, 2005
- Tokyo Electron Limited
- Tadashi Onishi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20120248064
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Tadashi ONISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING APPARATUS AND PROCESSING SYSTEM
- Publication number 20090242129
- Publication date Oct 1, 2009
- TOKYO ELECTRON, LIMITED
- Tadashi Onishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE CLEANING APPARATUS
- Publication number 20080236634
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Tsuyoshi MORIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20080223400
- Publication date Sep 18, 2008
- TOKYO ELECTRON LIMITED
- Tadashi ONISHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20080223399
- Publication date Sep 18, 2008
- TOKYO ELECTRON LIMITED
- Tadashi ONISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20080223825
- Publication date Sep 18, 2008
- TOKYO ELECTRON LIMITED
- Tadashi ONISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing apparatus and processing method
- Publication number 20060194516
- Publication date Aug 31, 2006
- TOKYO ELECTRON LIMITED
- Akiko Kamigori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film-processing method and film-processing apparatus
- Publication number 20050196712
- Publication date Sep 8, 2005
- Tadashi Onishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of processing an organic-film
- Publication number 20050042388
- Publication date Feb 24, 2005
- Kazuyuki Mitsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Surface treating device and surface treating method
- Publication number 20040262540
- Publication date Dec 30, 2004
- TOKYO ELECTRON LIMITED
- Kazuya Nagaseki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Thin film processing method and system
- Publication number 20040137760
- Publication date Jul 15, 2004
- TOKYO ELECTRON LIMITED
- Tadashi Onishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film-processing method and film-processing apparatus
- Publication number 20040131351
- Publication date Jul 8, 2004
- Tadashi Onishi
- H01 - BASIC ELECTRIC ELEMENTS

Tadashi Onishi

Person

Patents Grantslast 30 patents

Substrate processing system and substrate cleaning apparatus includ...

Method of processing an organic-film

Thin film processing method and system

Surface treating device and surface treating method

Film-processing method and film-processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

THERMAL PROCESSING APPARATUS AND PROCESSING SYSTEM

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE CLEANING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

Processing apparatus and processing method

Film-processing method and film-processing apparatus

Method of processing an organic-film

Surface treating device and surface treating method

Thin film processing method and system

Film-processing method and film-processing apparatus