Tadashi Otaka

Person

Hitachinaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam apparatus
- Patent number 8,334,520
- Issue date Dec 18, 2012
- Hitachi High-Technologies Corporation
- Tadashi Otaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 8,324,594
- Issue date Dec 4, 2012
- Hitachi High-Technologies Corporation
- Hiroyuki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample dimension measuring method and scanning electron microscope
- Patent number 8,080,789
- Issue date Dec 20, 2011
- Hitachi, Ltd.
- Osamu Nasu
- G01 - MEASURING TESTING
Information Patent Grant
Sample dimension measuring method and scanning electron microscope
- Patent number 7,910,886
- Issue date Mar 22, 2011
- Hitachi High-Technologies Corporation
- Hiroki Kawada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Monochromator and scanning electron microscope using the same
- Patent number 7,838,827
- Issue date Nov 23, 2010
- Hitachi High-Technologies Corporation
- Yoichi Ose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image evaluation method and microscope
- Patent number 7,805,023
- Issue date Sep 28, 2010
- Hitachi, Ltd.
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a sample image and charged particle beam apparatus
- Patent number 7,800,059
- Issue date Sep 21, 2010
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- G01 - MEASURING TESTING
Information Patent Grant
Method for measuring dimensions of sample and scanning electron mic...
- Patent number 7,659,508
- Issue date Feb 9, 2010
- Hitachi, Ltd.
- Osamu Nasu
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam alignment method and charged particle beam ap...
- Patent number 7,605,381
- Issue date Oct 20, 2009
- Hitachi, Ltd.
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample dimension-measuring method and charged particle beam apparatus
- Patent number 7,476,856
- Issue date Jan 13, 2009
- Hitachi High-Technologies Corporation
- Kenji Watanabe
- G01 - MEASURING TESTING
Information Patent Grant
Method and scanning electron microscope for measuring width of mate...
- Patent number 7,385,196
- Issue date Jun 10, 2008
- Hitachi High-Technologies Corporation
- Goroku Shimoma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for circuit pattern inspection
- Patent number 7,369,703
- Issue date May 6, 2008
- Hitachi, Ltd.
- Atsuko Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of forming a sample image and charged particle beam apparatus
- Patent number 7,361,894
- Issue date Apr 22, 2008
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image evaluation method and microscope
- Patent number 7,340,111
- Issue date Mar 4, 2008
- Hitachi, Ltd.
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monochromator and scanning electron microscope using the same
- Patent number 7,315,024
- Issue date Jan 1, 2008
- Hitachi High-Technologies Corporation
- Yoichi Ose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample dimension measuring method and scanning electron microscope
- Patent number 7,285,777
- Issue date Oct 23, 2007
- Hitachi High-Technologies Corporation
- Hiroki Kawada
- G01 - MEASURING TESTING
Information Patent Grant
Image evaluation method and microscope
- Patent number 7,236,651
- Issue date Jun 26, 2007
- Hitachi, Ltd.
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a sample image and charged particle beam apparatus
- Patent number 7,164,126
- Issue date Jan 16, 2007
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- G01 - MEASURING TESTING
Information Patent Grant
Micropattern shape measuring system and method
- Patent number 7,130,063
- Issue date Oct 31, 2006
- Hitachi High-Technologies Corporation
- Yasuhiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for circuit pattern inspection
- Patent number 7,095,884
- Issue date Aug 22, 2006
- Hitachi, Ltd.
- Atsuko Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electron microscopic inspection apparatus
- Patent number 7,091,496
- Issue date Aug 15, 2006
- Hitachi High-Technologies Corporation
- Sho Takami
- G01 - MEASURING TESTING
Information Patent Grant
Three-dimensional micropattern profile measuring system and method
- Patent number 7,038,767
- Issue date May 2, 2006
- Hitachi High-Technologies Corporation
- Yuya Toyoshima
- G01 - MEASURING TESTING
Information Patent Grant
Method of forming a sample image and charged particle beam apparatus
- Patent number 7,034,296
- Issue date Apr 25, 2006
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- G01 - MEASURING TESTING
Information Patent Grant
Monochromator and scanning electron microscope using the same
- Patent number 7,022,983
- Issue date Apr 4, 2006
- Hitachi High-Technologies Corporation
- Yoichi Ose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope
- Patent number 6,933,500
- Issue date Aug 23, 2005
- Hitachi, Ltd.
- Kazutoshi Kaji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Micropattern shape measuring system and method
- Patent number 6,894,790
- Issue date May 17, 2005
- Hitachi High-Technologies Corporation
- Yasuhiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam alignment method and charged particle beam ap...
- Patent number 6,864,493
- Issue date Mar 8, 2005
- Hitachi, Ltd.
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and scanning electron microscope for measuring dimension of...
- Patent number 6,791,084
- Issue date Sep 14, 2004
- Hitachi High-Technologies Corporation
- Goroku Shimoma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus using charged particle beam
- Patent number 6,667,483
- Issue date Dec 23, 2003
- Hitachi, Ltd.
- Atsushi Kobaru
- G01 - MEASURING TESTING
Information Patent Grant
Method of measuring length with scanning type electron microscope
- Patent number 6,653,634
- Issue date Nov 25, 2003
- Hitachi, Ltd.
- Tadashi Otaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20110260057
- Publication date Oct 27, 2011
- Tadashi Otaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample dimension measuring method and scanning electron microscope
- Publication number 20100038535
- Publication date Feb 18, 2010
- Osamu Nasu
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM ALIGNMENT METHOD AND CHARGED PARTICLE BEAM AP...
- Publication number 20100006755
- Publication date Jan 14, 2010
- Mitsugo Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20090218509
- Publication date Sep 3, 2009
- Hitachi High-Technologies Corporation
- Hiroyuki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Monochromator and scanning electron microscope using the same
- Publication number 20080237463
- Publication date Oct 2, 2008
- Yoichi Ose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming a sample image and charged particle beam apparatus
- Publication number 20080217535
- Publication date Sep 11, 2008
- Mitsugu Sato
- G01 - MEASURING TESTING
Information Patent Application
Sample dimension measuring method and scanning electron microscope
- Publication number 20080179517
- Publication date Jul 31, 2008
- Hitachi High-Technologies Corporation
- Hiroki Kawada
- B82 - NANO-TECHNOLOGY
Information Patent Application
Image evaluation method and microscope
- Publication number 20070280559
- Publication date Dec 6, 2007
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming a sample image and charged particle beam apparatus
- Publication number 20070029478
- Publication date Feb 8, 2007
- Mitsugu Sato
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for circuit pattern inspection
- Publication number 20060269121
- Publication date Nov 30, 2006
- Atsuko Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Monochromator and scanning electron microscope using the same
- Publication number 20060219910
- Publication date Oct 5, 2006
- Yoichi Ose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample dimension measuring method and scanning electron microscope
- Publication number 20050247876
- Publication date Nov 10, 2005
- HITACHI HIGH-TECHNOLOGIES CORPORATION
- Hiroki Kawada
- G01 - MEASURING TESTING
Information Patent Application
Image evaluation method and microscope
- Publication number 20050199811
- Publication date Sep 15, 2005
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Micropattern shape measuring system and method
- Publication number 20050182595
- Publication date Aug 18, 2005
- Yasuhiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron microscope
- Publication number 20050167589
- Publication date Aug 4, 2005
- Hitachi, Ltd.
- Kazutoshi Kaji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron microscope
- Publication number 20050127295
- Publication date Jun 16, 2005
- Hitachi, Ltd.
- Kazutoshi Kaji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample dimension-measuring method and charged particle beam apparatus
- Publication number 20050051721
- Publication date Mar 10, 2005
- Kenji Watanabe
- G01 - MEASURING TESTING
Information Patent Application
Method and scanning electron microscope for measuring width of mate...
- Publication number 20050006581
- Publication date Jan 13, 2005
- Goroku Shimoma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Monochromator and scanning electron microscope using the same
- Publication number 20040188607
- Publication date Sep 30, 2004
- Yoichi Ose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam alignment method and charged particle beam ap...
- Publication number 20040124364
- Publication date Jul 1, 2004
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron microscope
- Publication number 20040094712
- Publication date May 20, 2004
- Hitachi, Ltd.
- Kazutoshi Kaji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for measuring dimensions of sample and scanning electron mic...
- Publication number 20040051040
- Publication date Mar 18, 2004
- Osamu Nasu
- G01 - MEASURING TESTING
Information Patent Application
Electron microscopic inspection apparatus
- Publication number 20040036489
- Publication date Feb 26, 2004
- Sho Takami
- G01 - MEASURING TESTING
Information Patent Application
Method of forming a sample image and charged particle beam apparatus
- Publication number 20030141451
- Publication date Jul 31, 2003
- Mitsugu Sato
- G01 - MEASURING TESTING
Information Patent Application
Method of forming a sample image and charged particle beam apparatus
- Publication number 20030111602
- Publication date Jun 19, 2003
- Mitsugu Sato
- G01 - MEASURING TESTING
Information Patent Application
Three-dimensional micropattern profile measuring system and method
- Publication number 20030090651
- Publication date May 15, 2003
- Yuya Toyoshima
- G01 - MEASURING TESTING
Information Patent Application
Micropattern shape measuring system and method
- Publication number 20030090684
- Publication date May 15, 2003
- Yasuhiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and scanning electron microscope for measuring width of mate...
- Publication number 20030071214
- Publication date Apr 17, 2003
- Goroku Shimoma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Image evaluation method and microscope
- Publication number 20030039386
- Publication date Feb 27, 2003
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for circuit pattern inspection
- Publication number 20030021463
- Publication date Jan 30, 2003
- Atsuko Yamaguchi
- G01 - MEASURING TESTING

Tadashi Otaka

Person

Patents Grantslast 30 patents

Charged particle beam apparatus

Charged particle beam apparatus

Sample dimension measuring method and scanning electron microscope

Sample dimension measuring method and scanning electron microscope

Monochromator and scanning electron microscope using the same

Image evaluation method and microscope

Method of forming a sample image and charged particle beam apparatus

Method for measuring dimensions of sample and scanning electron mic...

Charged particle beam alignment method and charged particle beam ap...

Sample dimension-measuring method and charged particle beam apparatus

Method and scanning electron microscope for measuring width of mate...

Method and apparatus for circuit pattern inspection

Method of forming a sample image and charged particle beam apparatus

Image evaluation method and microscope

Monochromator and scanning electron microscope using the same

Sample dimension measuring method and scanning electron microscope

Image evaluation method and microscope

Method of forming a sample image and charged particle beam apparatus

Micropattern shape measuring system and method

Method and apparatus for circuit pattern inspection

Electron microscopic inspection apparatus

Three-dimensional micropattern profile measuring system and method

Method of forming a sample image and charged particle beam apparatus

Monochromator and scanning electron microscope using the same

Electron microscope

Micropattern shape measuring system and method

Charged particle beam alignment method and charged particle beam ap...

Method and scanning electron microscope for measuring dimension of...

Apparatus using charged particle beam

Method of measuring length with scanning type electron microscope

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM APPARATUS

Sample dimension measuring method and scanning electron microscope

CHARGED PARTICLE BEAM ALIGNMENT METHOD AND CHARGED PARTICLE BEAM AP...

CHARGED PARTICLE BEAM APPARATUS

Monochromator and scanning electron microscope using the same

Method of forming a sample image and charged particle beam apparatus

Sample dimension measuring method and scanning electron microscope

Image evaluation method and microscope

Method of forming a sample image and charged particle beam apparatus

Method and apparatus for circuit pattern inspection

Monochromator and scanning electron microscope using the same

Sample dimension measuring method and scanning electron microscope

Image evaluation method and microscope

Micropattern shape measuring system and method

Electron microscope

Electron microscope

Sample dimension-measuring method and charged particle beam apparatus

Method and scanning electron microscope for measuring width of mate...

Monochromator and scanning electron microscope using the same

Charged particle beam alignment method and charged particle beam ap...

Electron microscope

Method for measuring dimensions of sample and scanning electron mic...

Electron microscopic inspection apparatus

Method of forming a sample image and charged particle beam apparatus

Method of forming a sample image and charged particle beam apparatus

Three-dimensional micropattern profile measuring system and method

Micropattern shape measuring system and method

Method and scanning electron microscope for measuring width of mate...

Image evaluation method and microscope

Method and apparatus for circuit pattern inspection