TREA

Tadashi Rokkaku

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  • Hiroshima, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    DC or HF ion source
    • Patent number 5,369,337
    • Issue date Nov 29, 1994
    • Mitsubishi Jukogyo Kabushiki Kaisha
    • Kenichi Yanagi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Sputtering apparatus and an ion source
    • Patent number 5,288,386
    • Issue date Feb 22, 1994
    • Mitsubishi Jukogyo Kabushiki Kaisha
    • Kenichi Yanagi
    • H01 - BASIC ELECTRIC ELEMENTS