Tadashi Sato

Person

Mito, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method using the...
- Patent number 6,332,947
- Issue date Dec 25, 2001
- Hitachi, Ltd.
- Satoshi Ichimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method using the...
- Patent number 5,961,773
- Issue date Oct 5, 1999
- Hitachi, Ltd.
- Satoshi Ichimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam processing apparatus
- Patent number 5,750,987
- Issue date May 12, 1998
- Hitachi, Ltd.
- Satoshi Ichimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma generator
- Patent number 5,620,522
- Issue date Apr 15, 1997
- Hitachi, Ltd.
- Satoshi Ichimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for controlling opening and closing timings of a switchin...
- Patent number 5,563,459
- Issue date Oct 8, 1996
- Hitachi, Ltd.
- Yukio Kurosawa
- F02 - COMBUSTION ENGINES HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
Information Patent Grant
Switch mechanism
- Patent number 5,502,290
- Issue date Mar 26, 1996
- Hitachi, Ltd.
- Osamu Koyanagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid crystal mask type laser marking system
- Patent number 5,231,263
- Issue date Jul 27, 1993
- Hitachi, Ltd.
- Kouji Kuwabara
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical d.c. voltage transformer
- Patent number 5,153,427
- Issue date Oct 6, 1992
- Hitachi, Ltd.
- Genji Takahashi
- G01 - MEASURING TESTING
Information Patent Grant
Plasma generating apparatus
- Patent number 5,133,825
- Issue date Jul 28, 1992
- Hi Tachi, Ltd.
- Yoshimi Hakamata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetron sputter apparatus and method for forming films by using t...
- Patent number 4,865,709
- Issue date Sep 12, 1989
- Hitachi, Ltd.
- Yukio Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion source application device
- Patent number 4,851,668
- Issue date Jul 25, 1989
- Hitachi, Ltd.
- Tasunori Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source device
- Patent number 4,847,476
- Issue date Jul 11, 1989
- Hitachi, Ltd.
- Tadashi Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam apparatus
- Patent number 4,767,931
- Issue date Aug 30, 1988
- Hitachi, Ltd.
- Tadashi Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source
- Patent number 4,739,169
- Issue date Apr 19, 1988
- Hitachi, Ltd.
- Yukio Kurosawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High frequency plasma generation apparatus
- Patent number 4,716,491
- Issue date Dec 29, 1987
- Hitachi, Ltd.
- Yasunori Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source
- Patent number 4,713,585
- Issue date Dec 15, 1987
- Hitachi, Ltd.
- Yasunori Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for optically measuring a current
- Patent number 4,564,754
- Issue date Jan 14, 1986
- Hitachi, Ltd.
- Tadashi Sato
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for separating or capturing ions, and ion dete...
- Publication number 20030213903
- Publication date Nov 20, 2003
- Satoshi Ichimura
- G01 - MEASURING TESTING
Information Patent Application
Neutral beam processing apparatus and method
- Publication number 20020033446
- Publication date Mar 21, 2002
- Satoshi Ichimura
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Sputtering system, sputtering support system and sputtering control...
- Publication number 20020014402
- Publication date Feb 7, 2002
- Yoshihiko Nagamine
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Tadashi Sato

Person

Patents Grantslast 30 patents

Plasma processing apparatus and plasma processing method using the...

Plasma processing apparatus and plasma processing method using the...

Ion beam processing apparatus

Microwave plasma generator

Apparatus for controlling opening and closing timings of a switchin...

Switch mechanism

Liquid crystal mask type laser marking system

Optical d.c. voltage transformer

Plasma generating apparatus

Magnetron sputter apparatus and method for forming films by using t...

Ion source application device

Ion source device

Ion beam apparatus

Ion source

High frequency plasma generation apparatus

Ion source

Method and apparatus for optically measuring a current

Patents Applicationslast 30 patents

Method and apparatus for separating or capturing ions, and ion dete...

Neutral beam processing apparatus and method

Sputtering system, sputtering support system and sputtering control...