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Tadashi Shimazu

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  • Hyogo, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING SYSTEM
    • Publication number 20140057459
    • Publication date Feb 27, 2014
    • Mitsubishi Heavy Industries, Ltd.
    • Tadashi Shimazu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR PRODUCING SILICON NITRIDE FILM
    • Publication number 20130109154
    • Publication date May 2, 2013
    • Mitsubishi Heavy Industries, Ltd.
    • Seiji Nishikawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    • Publication number 20130025790
    • Publication date Jan 31, 2013
    • Mitsubishi Heavy Industries, Ltd.
    • Ryuichi Matsuda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    INSULATING FILM FOR SEMICONDUCTOR DEVICE, PROCESS AND APPARATUS FOR...
    • Publication number 20110266660
    • Publication date Nov 3, 2011
    • Mitsubishi Electric Corporation
    • Hidetaka Kafuku
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING SYSTEM
    • Publication number 20100310791
    • Publication date Dec 9, 2010
    • Mitsubishi Heavy Industries, Ltd.
    • Tadashi Shimazu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA FILM FORMING APPARATUS
    • Publication number 20100236482
    • Publication date Sep 23, 2010
    • Mitsubishi Heavy Industries, Ltd.
    • Hidetaka Kafuku
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SEASONING METHOD FOR FILM-FORMING APPARATUS
    • Publication number 20090242511
    • Publication date Oct 1, 2009
    • Mitsubishi Heavy Industries, Ltd.
    • Tadashi Shimazu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA TREATMENT METHOD AND PLASMA TREATMENT DEVICE
    • Publication number 20090176380
    • Publication date Jul 9, 2009
    • Mitsubishi Heavy Industries, Ltd.
    • Tadashi Shimazu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    • Publication number 20090127227
    • Publication date May 21, 2009
    • Mitsubishi Heavy Industries, Ltd.
    • Ryuichi Matsuda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma processing apparatus, plasma processing method, plasma film...
    • Publication number 20070224364
    • Publication date Sep 27, 2007
    • Ryuichi Matsuda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma processing apparatus
    • Publication number 20070107843
    • Publication date May 17, 2007
    • Mitsubishi Heavy Industries, Ltd.
    • Yuichi Kawano
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma processing system, plasma processing method, plasma film dep...
    • Publication number 20050202183
    • Publication date Sep 15, 2005
    • Mitsubishi Heavy Industries, Ltd.
    • Ryuichi Matsuda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma CVD apparatus
    • Publication number 20030145788
    • Publication date Aug 7, 2003
    • Mitsubishi Heavy Industries, Ltd.
    • Tadashi Shimazu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...