Tadashi SHOJO

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Amagasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Gas cluster processing device and gas cluster processing method
- Patent number 12,172,198
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Kazuya Dobashi
- B08 - CLEANING
Information Patent Grant
Cutting method of workpiece by forming reformed region and dry etch...
- Patent number 11,482,455
- Issue date Oct 25, 2022
- Iwatani Corporation
- Toshiki Manabe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Cutting method
- Patent number 11,380,586
- Issue date Jul 5, 2022
- Iwatani Corporation
- Toshiki Manabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas cluster processing device and gas cluster processing method
- Patent number 11,267,021
- Issue date Mar 8, 2022
- Tokyo Electron Limited
- Kazuya Dobashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GAS CLUSTER PROCESSING DEVICE AND GAS CLUSTER PROCESSING METHOD
- Publication number 20220143655
- Publication date May 12, 2022
- TOKYO ELECTRON LIMITED
- Kazuya DOBASHI
- B08 - CLEANING
Information Patent Application
Gas Cluster Processing Device and Gas Cluster Processing Method
- Publication number 20210107041
- Publication date Apr 15, 2021
- TOKYO ELECTRON LIMITED
- Kazuya DOBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CUTTING METHOD
- Publication number 20200365460
- Publication date Nov 19, 2020
- IWATANI CORPORATION
- Toshiki MANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CUTTING METHOD
- Publication number 20200365461
- Publication date Nov 19, 2020
- IWATANI CORPORATION
- Toshiki MANABE
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR