Tadashi Yamaguchi

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Yokohama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system, method of confirmation of its state of...
- Patent number 8,996,422
- Issue date Mar 31, 2015
- Nikon Corporation
- Hiroyuki Suzuki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Lithography information control system
- Patent number 5,243,377
- Issue date Sep 7, 1993
- Nikon Corporation
- Toshikazu Umatate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Substrate Processing System, Method of Confirmation of Its State of...
- Publication number 20070272151
- Publication date Nov 29, 2007
- Nikon Corporation
- Hiroyuki Suzuki
- G06 - COMPUTING CALCULATING COUNTING