Tadashi Yotsumoto

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Yokohama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor manufacturing apparatus, management apparatus therefo...
- Patent number 7,478,347
- Issue date Jan 13, 2009
- Kabushiki Kaisha Toshiba
- Hiromi Yajima
- G05 - CONTROLLING REGULATING
Information Patent Grant
Semiconductor manufacturing apparatus, management apparatus therefo...
- Patent number 7,065,725
- Issue date Jun 20, 2006
- Kabushiki Kaisha Toshiba
- Hiromi Yajima
- G05 - CONTROLLING REGULATING
Information Patent Grant
Pod and method of cleaning it
- Patent number 6,422,247
- Issue date Jul 23, 2002
- Kabushiki Kaisha Toshiba
- Noriaki Yoshikawa
- B08 - CLEANING
Information Patent Grant
Pod and method of cleaning it
- Patent number 6,267,123
- Issue date Jul 31, 2001
- Kabushiki Kaisha Toshiba
- Noriaki Yoshikawa
- B08 - CLEANING
Information Patent Grant
Clean storage equipment for substrates and method of storing substr...
- Patent number 6,123,120
- Issue date Sep 26, 2000
- Kabushiki Kaisha Toshiba
- Tadashi Yotsumoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Semiconductor manufacturing apparatus, management apparatus therefo...
- Publication number 20060190120
- Publication date Aug 24, 2006
- Kabushiki Kaisha Toshiba
- Hiromi Yajima
- G05 - CONTROLLING REGULATING
Information Patent Application
Semiconductor manufacturing apparatus, management apparatus therefo...
- Publication number 20030171836
- Publication date Sep 11, 2003
- Kabushiki Kaisha Toshiba
- Hiromi Yajima
- G05 - CONTROLLING REGULATING
Information Patent Application
Pod and method of cleaning it
- Publication number 20010020480
- Publication date Sep 13, 2001
- KABUSHIKI KAISHA TOSHIBA
- Noriaki Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Carrier system for carrying objects, carrier unit constituting carr...
- Publication number 20010008983
- Publication date Jul 19, 2001
- Tadashi Yotsumoto
- H01 - BASIC ELECTRIC ELEMENTS