Tadatoshi TOMITA

Person

Koshi City, Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and computer storage medium
- Patent number 10,586,711
- Issue date Mar 10, 2020
- Tokyo Electron Limited
- Makoto Muramatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment method using a block copolymer containing a hyd...
- Patent number 10,418,242
- Issue date Sep 17, 2019
- Tokyo Electron Limited
- Makoto Muramatsu
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Pattern forming method and heating apparatus
- Patent number 10,121,659
- Issue date Nov 6, 2018
- Tokyo Electron Limited
- Makoto Muramatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern forming method and heating apparatus
- Patent number 9,859,118
- Issue date Jan 2, 2018
- Tokyo Electron Limited
- Makoto Muramatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment method, computer storage medium and substrate t...
- Patent number 9,810,987
- Issue date Nov 7, 2017
- Tokyo Electron Limited
- Makoto Muramatsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate treatment method, computer storage medium, and substrate...
- Patent number 9,748,101
- Issue date Aug 29, 2017
- Tokyo Electron Limited
- Makoto Muramatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment method, computer readable storage medium and su...
- Patent number 9,741,583
- Issue date Aug 22, 2017
- Tokyo Electron Limited
- Makoto Muramatsu
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pattern forming method, pattern forming apparatus, and computer rea...
- Patent number 9,618,849
- Issue date Apr 11, 2017
- Tokyo Electron Limited
- Makoto Muramatsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pattern forming method, pattern forming apparatus, and non-transito...
- Patent number 9,530,645
- Issue date Dec 27, 2016
- Tokyo Electron Limited
- Makoto Muramatsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Use of topography to direct assembly of block copolymers in grapho-...
- Patent number 9,418,860
- Issue date Aug 16, 2016
- Tokyo Electron Limited
- Mark H. Somervell
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method
- Patent number 8,367,308
- Issue date Feb 5, 2013
- Tokyo Electron Limited
- Hiroshi Nakamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...
- Publication number 20190341255
- Publication date Nov 7, 2019
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND COMPUTER STORAGE MEDIUM
- Publication number 20180269072
- Publication date Sep 20, 2018
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...
- Publication number 20180065843
- Publication date Mar 8, 2018
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PATTERN FORMING METHOD AND HEATING APPARATUS
- Publication number 20180019118
- Publication date Jan 18, 2018
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...
- Publication number 20170287749
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER READABLE STORAGE MEDIUM AND SU...
- Publication number 20170133235
- Publication date May 11, 2017
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- B82 - NANO-TECHNOLOGY
Information Patent Application
PATTERN FORMING METHOD AND HEATING APPARATUS
- Publication number 20160293403
- Publication date Oct 6, 2016
- Tokyo Electron Limited
- Makoto MURAMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...
- Publication number 20160124307
- Publication date May 5, 2016
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND SUBSTRATE...
- Publication number 20150255271
- Publication date Sep 10, 2015
- TOKYO ELECTRON LIMITED
- Makoto Muramatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND S...
- Publication number 20150228512
- Publication date Aug 13, 2015
- TOKYO ELECTRON LIMITED
- Makoto Muramatsu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
USE OF TOPOGRAPHY TO DIRECT ASSEMBLY OF BLOCK COPOLYMERS IN GRAPHO-...
- Publication number 20150111387
- Publication date Apr 23, 2015
- TOKYO ELECTRON LIMITED
- Mark H. Somervell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN FORMING METHOD, PATTERN FORMING APPARATUS, AND NON-TRANSITO...
- Publication number 20150072536
- Publication date Mar 12, 2015
- TOKYO ELECTRON LIMITED
- Makoto Muramatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN FORMING METHOD, PATTERN FORMING APPARATUS, AND COMPUTER REA...
- Publication number 20150062545
- Publication date Mar 5, 2015
- TOKYO ELECTRON LIMITED
- Makoto Muramatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20110200949
- Publication date Aug 18, 2011
- TOKYO ELECTRON LIMITED
- Hiroshi Nakamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tadatoshi TOMITA

Person

Patents Grantslast 30 patents

Substrate processing method and computer storage medium

Substrate treatment method using a block copolymer containing a hyd...

Pattern forming method and heating apparatus

Pattern forming method and heating apparatus

Substrate treatment method, computer storage medium and substrate t...

Substrate treatment method, computer storage medium, and substrate...

Substrate treatment method, computer readable storage medium and su...

Pattern forming method, pattern forming apparatus, and computer rea...

Pattern forming method, pattern forming apparatus, and non-transito...

Use of topography to direct assembly of block copolymers in grapho-...

Substrate processing method

Patents Applicationslast 30 patents

SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...

SUBSTRATE PROCESSING METHOD AND COMPUTER STORAGE MEDIUM

SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...

PATTERN FORMING METHOD AND HEATING APPARATUS

SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...

SUBSTRATE TREATMENT METHOD, COMPUTER READABLE STORAGE MEDIUM AND SU...

PATTERN FORMING METHOD AND HEATING APPARATUS

SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...

SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND SUBSTRATE...

SUBSTRATE TREATMENT METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND S...

USE OF TOPOGRAPHY TO DIRECT ASSEMBLY OF BLOCK COPOLYMERS IN GRAPHO-...

PATTERN FORMING METHOD, PATTERN FORMING APPARATUS, AND NON-TRANSITO...

PATTERN FORMING METHOD, PATTERN FORMING APPARATUS, AND COMPUTER REA...

SUBSTRATE PROCESSING METHOD