Tadayoshi Okuya

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Ayase-city, JP

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Patents Grantslast 30 patents

Information Patent Grant
Local dry etching method
- Patent number 7,094,355
- Issue date Aug 22, 2006
- SPEEDFAM Co., Ltd.
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nanotopography removing method
- Patent number 6,875,701
- Issue date Apr 5, 2005
- Speedfam Co., Ltd
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Local dry etching method
- Patent number 6,649,528
- Issue date Nov 18, 2003
- Speedfam Co., Ltd.
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Discharge tube for a local etching apparatus and a local etching ap...
- Patent number 6,429,399
- Issue date Aug 6, 2002
- SPEEDFAM Co., Ltd.
- Michihiko Yanagisawa
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Local dry etching method
- Publication number 20040142571
- Publication date Jul 22, 2004
- SPEEDFAM Co., Ltd.
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Local dry etching method
- Publication number 20020173149
- Publication date Nov 21, 2002
- SPEEDFAM Co., Ltd.
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Nanotopography removing method
- Publication number 20020104825
- Publication date Aug 8, 2002
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Discharge tube for a local etching apparatus and a local etching ap...
- Publication number 20010019040
- Publication date Sep 6, 2001
- Michihiko Yanagisawa
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR