Tadayoshi Yoshikawa

Person

Nagano-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Tray and wafer holding apparatus
- Patent number 9,837,297
- Issue date Dec 5, 2017
- Shinko Electric Industries Co., Ltd.
- Koki Tamagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dielectric layer for electrostatic chuck and electrostatic chuck
- Patent number 9,120,704
- Issue date Sep 1, 2015
- Nippon Tungsten Co., Ltd.
- Kouta Tsutsumi
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Substrate, substrate holding apparatus, analysis apparatus, program...
- Patent number 8,686,743
- Issue date Apr 1, 2014
- Philtech Inc.
- Yuji Furumura
- G01 - MEASURING TESTING
Information Patent Grant
Substrate temperature control fixing apparatus
- Patent number 8,505,928
- Issue date Aug 13, 2013
- Shinko Electric Industries Co., Ltd.
- Miki Saito
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate for electrostatic chuck and electrostatic chuck
- Patent number 8,441,772
- Issue date May 14, 2013
- Shinko Electric Industries Co., Ltd.
- Tadayoshi Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE FIXING DEVICE
- Publication number 20200294838
- Publication date Sep 17, 2020
- Shinko Electric Industries Co., Ltd.
- Tadayoshi YOSHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRAY AND WAFER HOLDING APPARATUS
- Publication number 20150371885
- Publication date Dec 24, 2015
- Shinko Electric Industries Co., Ltd.
- Koki TAMAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIELECTRIC LAYER FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK
- Publication number 20140103612
- Publication date Apr 17, 2014
- NIPPON TUNGSTEN CO., LTD.
- Kouta Tsutsumi
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
SUBSTRATE FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK
- Publication number 20110096461
- Publication date Apr 28, 2011
- Shinko Electric Industries Co., Ltd.
- Tadayoshi YOSHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TEMPERATURE CONTROL FIXING APPARATUS
- Publication number 20100156055
- Publication date Jun 24, 2010
- Shinko Electric Industries Co., Ltd.
- Miki Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate, substrate holding apparatus, analysis apparatus, program...
- Publication number 20100134122
- Publication date Jun 3, 2010
- Philtech Inc.
- Yuji Furumura
- G01 - MEASURING TESTING
Information Patent Application
ELECTROSTATIC CHUCK AND SUBSTRATE TEMPERATURE ADJUSTING-FIXING DEVICE
- Publication number 20090168292
- Publication date Jul 2, 2009
- Shinko Electric Industries Co., Ltd.
- Naoto Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20090059461
- Publication date Mar 5, 2009
- Shinko Electric Industries Co., Ltd.
- Hiroshi Yonekura
- H01 - BASIC ELECTRIC ELEMENTS

Tadayoshi Yoshikawa

Person

Patents Grantslast 30 patents

Tray and wafer holding apparatus

Dielectric layer for electrostatic chuck and electrostatic chuck

Substrate, substrate holding apparatus, analysis apparatus, program...

Substrate temperature control fixing apparatus

Substrate for electrostatic chuck and electrostatic chuck

Patents Applicationslast 30 patents

SUBSTRATE FIXING DEVICE

TRAY AND WAFER HOLDING APPARATUS

DIELECTRIC LAYER FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK

SUBSTRATE FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK

SUBSTRATE TEMPERATURE CONTROL FIXING APPARATUS

Substrate, substrate holding apparatus, analysis apparatus, program...

ELECTROSTATIC CHUCK AND SUBSTRATE TEMPERATURE ADJUSTING-FIXING DEVICE

ELECTROSTATIC CHUCK