Tadayuki Kubo

Person

Ushiku, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Shock absorbing apparatus in a positioning apparatus
- Patent number 7,198,141
- Issue date Apr 3, 2007
- Canon Kabushiki Kaisha
- Tadayuki Kubo
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Positioning method, and positioning apparatus
- Patent number 7,184,129
- Issue date Feb 27, 2007
- Canon Kabushiki Kaisha
- Tadayuki Kubo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage device, exposure apparatus, device manufacturing method and m...
- Patent number 6,644,855
- Issue date Nov 11, 2003
- Canon Kabushiki Kaisha
- Shigeo Sakino
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Stage system and exposure apparatus with the same
- Patent number 6,408,045
- Issue date Jun 18, 2002
- Canon Kabushiki Kaisha
- Shin Matsui
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Linear driving device
- Patent number 5,317,221
- Issue date May 31, 1994
- Canon Kabushiki Kaisha
- Tadayuki Kubo
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Positioning mechanism
- Patent number 5,280,677
- Issue date Jan 25, 1994
- Canon Kabushiki Kaisha
- Tadayuki Kubo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Rectilinear-motion driving device for voice coil motor
- Patent number 5,142,172
- Issue date Aug 25, 1992
- Canon Kabushiki Kaisha
- Michio Horikoshi
- B26 - HAND CUTTING TOOLS CUTTING SEVERING

Patents Applicationslast 30 patents

Information Patent Application
Positioning method, and positioning apparatus
- Publication number 20050018161
- Publication date Jan 27, 2005
- Canon Kabushiki Kaisha
- Tadayuki Kubo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Sample-setting moving stage, manufacturing apparatus for circuit pa...
- Publication number 20040250776
- Publication date Dec 16, 2004
- Masaki Mizuochi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Shock absorbing apparatus in a positioning apparatus
- Publication number 20040046294
- Publication date Mar 11, 2004
- Canon Kabushiki Kaisha
- Tadayuki Kubo
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Stage device, exposure apparatus, device manufacturing method and m...
- Publication number 20020118897
- Publication date Aug 29, 2002
- Canon Kabushiki Kaisha
- Shigeo Sakino
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Tadayuki Kubo

Person

Patents Grantslast 30 patents

Shock absorbing apparatus in a positioning apparatus

Positioning method, and positioning apparatus

Stage device, exposure apparatus, device manufacturing method and m...

Stage system and exposure apparatus with the same

Linear driving device

Positioning mechanism

Rectilinear-motion driving device for voice coil motor

Patents Applicationslast 30 patents

Positioning method, and positioning apparatus

Sample-setting moving stage, manufacturing apparatus for circuit pa...

Shock absorbing apparatus in a positioning apparatus

Stage device, exposure apparatus, device manufacturing method and m...