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MEMS device
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Patent number 11,629,046
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Issue date Apr 18, 2023
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Murata Manufacturing Co., Ltd.
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Keiichi Umeda
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Resonance device
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Patent number 10,998,857
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Issue date May 4, 2021
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Murata Manufacturing Co., Ltd.
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Keiichi Umeda
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Mounting substrate
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Patent number 10,177,289
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Issue date Jan 8, 2019
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MURATA MANUFACTURING CO., LTD.
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Yuki Fukui
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H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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