Tadayuki Satou

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Susono, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck and vacuum processing apparatus
- Patent number 8,724,288
- Issue date May 13, 2014
- ULVAC, Inc.
- Tadayuki Satou
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK AND VACUUM PROCESSING APPARATUS
- Publication number 20110132259
- Publication date Jun 9, 2011
- Tadayuki Satou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRY ETCHING METHOD
- Publication number 20100133233
- Publication date Jun 3, 2010
- Yasuhiro Morikawa
- H03 - BASIC ELECTRONIC CIRCUITRY