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Taehwa Kim
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Hwaseong-si, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method for plasma etching
Patent number
12,211,672
Issue date
Jan 28, 2025
Samsung Electronics Co., Ltd.
Jongwoo Sun
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Apparatus and method for plasma etching
Patent number
11,984,304
Issue date
May 14, 2024
Samsung Electronics Co., Ltd.
Jongwoo Sun
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS AND METHOD FOR PLASMA ETCHING
Publication number
20240258084
Publication date
Aug 1, 2024
Jongwoo Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR PLASMA ETCHING
Publication number
20220328291
Publication date
Oct 13, 2022
Samsung Electronics Co., Ltd.
Jongwoo Sun
H01 - BASIC ELECTRIC ELEMENTS