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Taek-Soo Jung
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Anyang City, KR
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Patents Grants
last 30 patents
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Patent Grant
Carrier head for chemical mechanical polishing apparatus
Patent number
7,121,934
Issue date
Oct 17, 2006
Doosan DND Co., Ltd.
Taek-Soo Jung
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Carrier head for chemical mechanical polishing apparatus
Publication number
20050272355
Publication date
Dec 8, 2005
Taek-Soo Jung
B24 - GRINDING POLISHING