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Taeko Ikegawa
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Kanagawa, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Copolymer, photoresist composition, and process for forming resist...
Patent number
6,884,566
Issue date
Apr 26, 2005
Tokyo Ohka Kogyo Co., Ltd.
Tsuyoshi Nakamura
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Copolymer, photoresist composition, and process for forming resist...
Patent number
6,517,993
Issue date
Feb 11, 2003
Tokyo Ohka Kogyo Co., Ltd.
Tsuyoshi Nakamura
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
Novel copolymer, photoresist composition, and process for forming r...
Publication number
20040096772
Publication date
May 20, 2004
Tokyo Ohka Kogyo Co., Ltd.
Tsuyoshi Nakamura
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
Novel copolymer, photoresist composition, and process for forming r...
Publication number
20030186171
Publication date
Oct 2, 2003
Tokyo Ohka Kogyo Co., Ltd.
Tsuyoshi Nakamura
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
Novel copolymer, photoresist composition, and process for forming r...
Publication number
20020031719
Publication date
Mar 14, 2002
Tokyo Ohka Kogyo Co., Ltd.
Tsuyoshi Nakamura
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
Novel copolymer, photoresist composition , and process for forming...
Publication number
20020031720
Publication date
Mar 14, 2002
Tokyo Ohka Kogyo Co., Ltd.
Tsuyoshi Nakamura
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...