Taemin EARMME

Person

Hwaseong-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for monitoring substrate processing apparatus
- Patent number 12,068,140
- Issue date Aug 20, 2024
- Samsung Electronics Co., Ltd.
- Sejin Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma control device and plasma processing system
- Patent number 11,984,297
- Issue date May 14, 2024
- Samsung Electronics Co., Ltd.
- Sejin Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conditioner, chemical mechanical polishing apparatus including the...
- Patent number 11,964,357
- Issue date Apr 23, 2024
- Samsung Electronics Co., Ltd.
- Seungchul Han
- B24 - GRINDING POLISHING
Information Patent Grant
Method of fabricating a semiconductor device
- Patent number 11,955,387
- Issue date Apr 9, 2024
- Samsung Electronics Co., Ltd.
- Seongkeun Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and semiconductor device manufacturing...
- Patent number 11,929,239
- Issue date Mar 12, 2024
- Samsung Electronics Co., Ltd.
- Sejin Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chuck assembly, semiconductor device fabricating apparatus includin...
- Patent number 11,605,551
- Issue date Mar 14, 2023
- Samsung Electronics Co., Ltd.
- Youngjae Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotary body module and chemical mechanical polishing apparatus havi...
- Patent number 11,590,628
- Issue date Feb 28, 2023
- Samsung Electronics Co., Ltd.
- Yonghee Lee
- B24 - GRINDING POLISHING
Information Patent Grant
Conditioner, chemical mechanical polishing apparatus including the...
- Patent number 11,471,996
- Issue date Oct 18, 2022
- Samsung Electronics Co., Ltd.
- Seungchul Han
- B24 - GRINDING POLISHING
Information Patent Grant
Load cup and chemical mechanical polishing apparatus and method of...
- Patent number 11,027,394
- Issue date Jun 8, 2021
- Samsung Electronics Co., Ltd.
- Jieun Yang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20240381616
- Publication date Nov 14, 2024
- Samsung Electronics Co., Ltd.
- Seongkeun CHO
Information Patent Application
METHOD AND SYSTEM FOR MONITORING SUBSTRATE PROCESSING APPARATUS
- Publication number 20240371611
- Publication date Nov 7, 2024
- Samsung Electronics Co., Ltd.
- SEJIN OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING A SEMICONDUCTOR DEVICE
- Publication number 20240162096
- Publication date May 16, 2024
- Samsung Electronics Co., Ltd.
- Seongkeun CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTU...
- Publication number 20230117953
- Publication date Apr 20, 2023
- Samsung Electronics Co., Ltd.
- Sejin OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA CONTROL DEVICE AND PLASMA PROCESSING SYSTEM
- Publication number 20230091161
- Publication date Mar 23, 2023
- Samsung Electronics Co., Ltd.
- Sejin OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONDITIONER, CHEMICAL MECHANICAL POLISHING APPARATUS INCLUDING THE...
- Publication number 20220331931
- Publication date Oct 20, 2022
- Samsung Electronics Co., Ltd.
- Seungchul HAN
- B24 - GRINDING POLISHING
Information Patent Application
PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING...
- Publication number 20220223385
- Publication date Jul 14, 2022
- Samsung Electronics Co., Ltd.
- Sejin Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHUCK ASSEMBLY, SEMICONDUCTOR DEVICE FABRICATING APPARATUS INCLUDIN...
- Publication number 20220223452
- Publication date Jul 14, 2022
- Samsung Electronics Co., Ltd.
- Youngjae SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING A SEMICONDUCTOR DEVICE
- Publication number 20220199473
- Publication date Jun 23, 2022
- Samsung Electronics Co., Ltd.
- Seongkeun CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR MONITORING SUBSTRATE PROCESSING APPARATUS
- Publication number 20220199374
- Publication date Jun 23, 2022
- Samsung Electronics Co., Ltd.
- SEJIN OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHODS OF MANUFACTURING SEMICONDUC...
- Publication number 20220165550
- Publication date May 26, 2022
- Samsung Electronics Co., Ltd.
- Kyoungchon Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROTARY BODY MODULE AND CHEMICAL MECHANICAL POLISHING APPARATUS HAVI...
- Publication number 20210008686
- Publication date Jan 14, 2021
- Samsung Electronics Co., Ltd.
- Yonghee LEE
- B24 - GRINDING POLISHING
Information Patent Application
CONDITIONER, CHEMICAL MECHANICAL POLISHING APPARATUS INCLUDING THE...
- Publication number 20200346317
- Publication date Nov 5, 2020
- Samsung Electronics Co., Ltd.
- Seungchul HAN
- B24 - GRINDING POLISHING
Information Patent Application
LOAD CUP AND CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD OF...
- Publication number 20190176291
- Publication date Jun 13, 2019
- Samsung Electronics Co., Ltd.
- Jieun YANG
- H01 - BASIC ELECTRIC ELEMENTS

Taemin EARMME

Person

Patents Grantslast 30 patents

Method and system for monitoring substrate processing apparatus

Plasma control device and plasma processing system

Conditioner, chemical mechanical polishing apparatus including the...

Method of fabricating a semiconductor device

Plasma processing apparatus and semiconductor device manufacturing...

Chuck assembly, semiconductor device fabricating apparatus includin...

Rotary body module and chemical mechanical polishing apparatus havi...

Conditioner, chemical mechanical polishing apparatus including the...

Load cup and chemical mechanical polishing apparatus and method of...

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

METHOD AND SYSTEM FOR MONITORING SUBSTRATE PROCESSING APPARATUS

METHOD OF FABRICATING A SEMICONDUCTOR DEVICE

PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTU...

PLASMA CONTROL DEVICE AND PLASMA PROCESSING SYSTEM

CONDITIONER, CHEMICAL MECHANICAL POLISHING APPARATUS INCLUDING THE...

PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING...

CHUCK ASSEMBLY, SEMICONDUCTOR DEVICE FABRICATING APPARATUS INCLUDIN...

METHOD OF FABRICATING A SEMICONDUCTOR DEVICE

METHOD AND SYSTEM FOR MONITORING SUBSTRATE PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND METHODS OF MANUFACTURING SEMICONDUC...

ROTARY BODY MODULE AND CHEMICAL MECHANICAL POLISHING APPARATUS HAVI...

CONDITIONER, CHEMICAL MECHANICAL POLISHING APPARATUS INCLUDING THE...

LOAD CUP AND CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD OF...