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Tai-Hee Kang
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Kyungsangbuk-do, KR
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last 30 patents
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Patent Grant
Method for high resolution patterning using soft X-ray, process for...
Patent number
7,267,932
Issue date
Sep 11, 2007
Postech Foundation
Joon Won Park
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
Method for high resolution patterning using soft X-ray, process for...
Publication number
20080038542
Publication date
Feb 14, 2008
POSTECH FOUNDATION
Joon Won Park
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
Method for high resolution patterning using soft x-ray, process for...
Publication number
20040241590
Publication date
Dec 2, 2004
Joon Won Park
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
Method for high resolution patterning using low-energy electron bea...
Publication number
20040241582
Publication date
Dec 2, 2004
Joon Won Park
B82 - NANO-TECHNOLOGY