Taichi Fugita

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Yamato, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for forming reduced pressure and for processing object
- Patent number 5,223,113
- Issue date Jun 29, 1993
- Tokyo Electron Limited
- Satoshi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pressure-reduced chamber system having a filter means
- Patent number 5,178,638
- Issue date Jan 12, 1993
- Tokyo Electron Limited
- Satoshi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS