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Osaka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Photomask and pattern forming method
Patent number
6,977,133
Issue date
Dec 20, 2005
Matsushita Electric Industrial Co., Ltd.
Taichi Koizumi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming a resist pattern utilizing correlation between la...
Patent number
5,773,174
Issue date
Jun 30, 1998
Matsushita Electric Industrial Co., Ltd.
Taichi Koizumi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming a resist pattern utilizing correlation between la...
Patent number
5,763,124
Issue date
Jun 9, 1998
Matsushita Electric Industrial Co., Ltd.
Taichi Koizumi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming a resist pattern utilizing correlation between la...
Patent number
5,756,242
Issue date
May 26, 1998
Matsushita Electric Industrial Co., Ltd.
Taichi Koizumi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fine pattern forming material and pattern forming method
Patent number
5,306,601
Issue date
Apr 26, 1994
Matsushita Electric Industrial Co., Ltd.
Kazuhiko Hashimoto
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Pattern forming process
Patent number
5,275,921
Issue date
Jan 4, 1994
Matsushita Electric Industrial Co., Ltd.
Taichi Koizumi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fine pattern forming method
Patent number
5,169,494
Issue date
Dec 8, 1992
Matsushita Electric Industrial Co., Ltd.
Kazuhiko Hashimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scanning electron microscope and a method of displaying cross secti...
Patent number
5,057,689
Issue date
Oct 15, 1991
Matsushita Electric Industrial Co., Ltd.
Noboru Nomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fine pattern forming method
Patent number
5,030,549
Issue date
Jul 9, 1991
Matsushita Electric Industrial Co., Ltd.
Kazuhiko Hashimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fine pattern forming method
Patent number
4,976,818
Issue date
Dec 11, 1990
Matsushita Electric Industrial Co., Ltd.
Kazuhiko Hashimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of reducing proximity effect in electron beam resists
Patent number
4,936,951
Issue date
Jun 26, 1990
Matsushita Electric Industrial Co., Ltd.
Kazuhiko Hashimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Photomask and pattern forming method
Publication number
20030199124
Publication date
Oct 23, 2003
Matsushita Electric Industrial Co., Ltd.
Taichi Koizumi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY